Taiwan Semiconductor Manufacturing Comp. Ltd.

Chun-Hau Chen

Chi-Feng Tung

Hsiang Yin Shen

Fu-Hsien Li

Chuan Wei Lin

Chen-Wei Lu

Kuan Yu Lai

A storage environment monitoring device is capable of measuring and/or monitoring various parameters of an environment inside a storage area, such as airflow, temperature, and humidity, to increase the storage quality of semiconductor components stored in the storage area. The storage environment monitoring device is capable of measuring and/or monitoring the parameters of the environment inside the storage area without having to open an enclosure that is storing the semiconductor components in the storage area. This reduces exposure of the semiconductor components to contamination and other environmental factors. In addition, the storage environment monitoring device may perform automatic measurements inside the storage area based on usage schedules of the semiconductor components that are to be stored in the storage area, which decreases downtime of the storage area and/or the semiconductor components, and increases productivity in a semiconductor processing environment in which the semiconductor components are used.

Growing community of inventors

Hsinchu, Taiwan

Chun-Hau Chen