Taiwan Semiconductor Manufacturing Comp. Ltd.

Chun Fu Chen

Ming-Hsien Lin

Tsung-Cheng Wu

Sheng-Ying Wu

In order to reduce the occurrence of current alarms in a semiconductor etching or deposition process, a controller determines an offset in relative positions of a cover ring and a shield over a wafer within a vacuum chamber. The controller provides a position alarm and/or adjusts the position of the cover ring or shield when the offset is greater than a predetermined value or outside a range of acceptable values.

Growing community of inventors

Hsinchu, Taiwan

Chun Fu Chen