Taiwan Semiconductor Manufacturing Comp. Ltd.

Chun-Fu Chen

Hui-Zhong Zhuang

Ting-Wei Chiang

Shang-Chih Hsieh

Hsiang-Jen Tseng

Li-Chun Tien

Jen-Hang Yang

Pin-Dai Sue

Ya-Chi Chou

Hsiang Jen Tseng

Wei-Yu Chen

Ming-Hsien Lin

Tsung-Cheng Wu

Sheng-Ying Wu

To reduce the occurrence of current alarms in a semiconductor etching or deposition process, a controller determines an offset in relative positions of a cover ring and a shield over a wafer within a vacuum chamber. The controller provides a position alarm and/or adjusts the position of the cover ring or shield when the offset is greater than a predetermined value or outside a range of acceptable values.

Apparatus and method of manufacturing a semiconductor device

An integrated circuit includes a plurality of metal lines extending along a first direction, the plurality of metal lines being separated, in a second direction perpendicular to the first direction, by integral multiples of a nominal minimum pitch. The integrated circuit further includes a plurality of standard cells, at least one of the plurality of standard cells having a cell height along the second direction being a non-integral multiple of the nominal minimum pitch.

Integrated circuit having non-integral multiple pitch

An integrated circuit designing system includes a non-transitory storage medium, the non-transitory storage medium being encoded with a layout of a standard cell corresponding to a predetermined manufacturing process, the predetermined manufacturing process having a nominal minimum pitch of metal lines along a predetermined direction, the layout of the standard cell having a cell height along the predetermined direction, and the cell height is a non-integral multiple of the nominal minimum pitch. The integrated circuit designing system further includes a hardware processor communicatively coupled with the non-transitory storage medium and configured to execute a set of instructions for generating an integrated circuit layout based on the layout of the standard cell and the nominal minimum pitch.

System for designing integrated circuit layout and method of making the integrated circuit layout

An integrated circuit designing system includes a non-transitory storage medium encoded with a first set of standard cell layouts and a second set of standard cell layouts both being configured to perform a predetermined function. The predetermined manufacturing process having a nominal minimum pitch (T) of metal lines. Each standard cell layout of the first set of standard cell layouts and the second set of standard cell layouts having a cell height (H) wherein the cell height is a non-integral multiple of the nominal minimum pitch. A hardware processor communicatively is coupled with the non-transitory storage medium and is configured to execute a set of instructions for generating an integrated circuit layout based on the first set of standard cell layouts, the second set of standard cell layouts and the nominal minimum pitch; and creating a data file corresponding to the integrated circuit layout.

Integrated circuit designing system

A semiconductor device includes an array of Engineering Change Order (ECO) cells. Each of the ECO cells in the array includes a first metal pattern and a second metal pattern. Each of the ECO cells in the array further includes a plurality of active area patterns isolated from each other and arranged between the first and second metal patterns. Each of the ECO cells in the array further includes a first central metal pattern overlapping the first metal pattern. Each of the ECO cells in the array further includes a via electrically connecting the first central metal pattern to the first metal pattern. The plurality of active area patterns is arranged symmetrically about the first central metal pattern.

Semiconductor device having engineering change order (ECO) cells and method of using

An integrated circuit designing system includes a non-transitory storage medium that is encoded with first and second sets of standard cell layouts that are configured for performing a selected function and which correspond to a specific manufacturing process. The manufacturing process is characterized by a nominal minimum pitch (T) for metal lines with each of the standard cell layouts being characterized by a cell height (H) that is a non-integral multiple of the nominal minimum pitch. The system also includes a hardware processor coupled to the storage medium for executing a set of instructions for generating an integrated circuit layout utilizing a combination of the first and second set of standard cell layouts and the nominal minimum pitch. The first and second sets of standard layouts are related in that each of the second set of standard cell layouts corresponds to a transformed version of a corresponding standard cell layout from the first set of standard cell layouts.

Layout of standard cells for predetermined function in integrated circuits

An integrated circuit designing system includes a non-transitory storage medium and a hardware processor. The non-transitory storage medium is encoded with a layout of a standard cell corresponding to a predetermined manufacturing process. The predetermined manufacturing process has a nominal minimum pitch, along a predetermined direction, of metal lines. The layout of the standard cell has a cell height along the predetermined direction, and the cell height is a non-integral multiple of the nominal minimum pitch. The hardware processor communicatively coupled with the non-transitory storage medium and configured to execute a set of instructions for generating an integrated circuit layout based on the layout of the standard cell and the nominal minimum pitch.

A layout of a standard cell is stored on a non-transitory computer-readable medium and includes a first conductive pattern, a second conductive pattern, a plurality of active area patterns and a first central conductive pattern. The plurality of active area patterns is isolated from each other and arranged in a first row and a second row between the first and second conductive patterns. The first row is adjacent the first conductive pattern and includes a first active area pattern and a second active area pattern among the plurality of active area patterns. The second row is adjacent the second conductive pattern and includes a third active area pattern and a fourth active area pattern among the plurality of active area patterns. The first central conductive pattern is arranged between the first and second active area patterns. The first central conductive pattern overlaps the first conductive pattern.

Standard cell layout, semiconductor device having engineering change order (ECO) cells and method

An integrated circuit, manufactured by a process having a nominal minimum pitch of metal lines, includes a plurality of metal lines and a plurality of standard cells under the plurality of metal lines. The plurality of metal lines extends along a first direction, and the plurality of metal lines are separated, in a second direction perpendicular to the first direction, by integral multiples of the nominal minimum pitch. At least one of the plurality of standard cells has a cell height along the second direction, and the cell height is a non-integral multiple of the nominal minimum pitch.

Standard cell having cell height being non-integral multiple of nominal minimum pitch

An integrated circuit is manufactured by a predetermined manufacturing process having a nominal minimum pitch of metal lines. The integrated circuit includes a plurality of metal lines extending along a first direction and a plurality of standard cells under the plurality of metal lines. The plurality of metal lines is separated, in a second direction perpendicular to the first direction, by integral multiples of the nominal minimum pitch. The plurality of standard cells includes a first standard cell configured to perform a predetermined function and having a first layout and a second standard cell configured to perform the predetermined function and having a second layout different than the first layout. The first and second standard cells have a cell height (H) along the second direction, and the cell height being a non-integral multiple of the nominal minimum pitch.

Standard cells for predetermined function having different types of layout

An integrated circuit layout includes a first active region, a second active region, a first PODE (poly on OD edge), a second PODE, a first transistor and a second transistor. The first transistor, on the first active region, includes a gate electrode, a source region and a drain region. The second transistor, on the second active region, includes a gate electrode, a source region and a drain region. The first active region and the second active region are adjacent and electrically disconnected with each other. The first PODE and the second PODE are on respective adjacent edges of the first active region and the second active region. The source regions of the first and second transistor are adjacent with the first PODE and the second PODE respectively. The first PODE and the second PODE are sandwiched between source regions of the first transistor and the second transistor.

Method and layout of an integrated circuit

An antenna cell for preventing plasma enhanced gate dielectric failures, is provided. The antenna cell design utilizes a polysilicon lead as a gate for a dummy transistor. The polysilicon lead may be one of a group of parallel, nested polysilicon lead. The dummy transistor includes the gate coupled to a substrate maintained at V, either directly through a metal lead or indirectly through a tie-low cell. The gate is disposed over a dielectric disposed over a continuous source/drain region in which the source and drain are tied together. A diode is formed with the semiconductor substrate within which it is formed. The source/drain region is coupled to another metal lead which may be an input pin and is coupled to active transistor gates, preventing plasma enhanced gate dielectric damage to the active transistors.

Method for designing antenna cell that prevents plasma induced gate dielectric damage in semiconductor integrated circuits

A semiconductor structure includes a first active area structure, an isolation structure surrounding the first active area structure, a first polysilicon structure, a first metal structure, and a second metal structure. The first polysilicon structure is over the first active area structure. The first metal structure is directly over a first portion of the first active area structure. The second metal structure is directly over and in contact with a portion of the first polysilicon structure and in contact with the first metal structure.

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Chiayi, Taiwan

Chun-Fu Chen