Qualcomm Mems Technologies, Inc.

Chun-chen Wu

Chen-Jean Chou

Patrick F Brinkley

A method of fabricating a MEMS device includes conditioning of an insulating layer by applying a voltage across the insulating layer via a conductive sacrificial layer for a period of time, prior to removal of the conductive sacrificial layer. This conditioning process may be used to saturate or stabilize charge accumulated within the insulating layer. The resistance across the insulating layer may also be measured to detect possible defects in the insulating layer.

Growing community of inventors

Hsinchu, Taiwan

Chun-chen Wu