Samsung Electronics Co., Ltd.

Chulwoong Lee

Dongsuk Shin

Pankwi Park

Donghyun Roh

Naein Lee

Nae-in Lee

Kwanghyuk Bae

Hayoung Ko

Muncheon Kang

Duckchan Seo

A method of calibrating errors in a time-of-flight (ToF) sensor includes illuminating a test object with a transmission light that is modulated based on a modulation signal; generating, using a buffer chain circuit, a plurality of demodulation signals having different local delay phases; providing a plurality of measured phase differences by providing the plurality of demodulation signals to a plurality of pixel groups included in a ToF sensor to sample a reception light reflected from the test object based on the plurality of demodulation signals; determining a wiggling error based on the plurality of measured phase differences, the wiggling error depending on a phase difference between the transmission light and the reception light; and calibrating a measured distance from the ToF sensor to a target object based on the wiggling error.

Time-of-flight sensor and method of calibrating errors in the same

According to embodiments of the inventive concept, a gate electrode is formed on a substrate, and a first spacer, a second spacer, and a third spacer are sequentially formed on a sidewall of the gate electrode. The substrate is etched to form a recess region. A compressive stress pattern is formed in the recess region. A protective spacer is formed on a sidewall of the third spacer. When the recess region is formed, a lower portion of the second spacer is removed to form a gap region between the first and third spacers. The protective spacer fills the gap region.

Semiconductor devices and methods of forming the same

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Suwon-si, South Korea

Chulwoong Lee