Lg Semicon Co., Ltd.

Chul Ho Park

Kwang Bok Song

Jin Seop Shim

A solid state image pickup device includes a semiconductor substrate, a CCD channel region in the semiconductor substrate, a plurality of polygates over the CCD channel regions, and a photoelectric conversion region having a portion above an uppermost surface of the semiconductor substrate.

Solid state image pickup device with polygates

A color charge-coupled device is disclosed including plural light detectors corresponding to first to third colors and plural charge transmission regions on a semiconductor substrate; a pad on one side of the substrate excluding a portion where the light detectors and charge transmission regions are formed; a planarizing film on the substrate excluding the pad; microlenses on the planarizing film above the light detectors; and first to third color filter layers on each microlens excluding the edge portion.

Color charge-coupled device

A CCD and manufacturing method thereof is disclosed including: a first conductivity-type substrate having a convex portion; a first conductivity-type charge transmission domain formed on the substrate excluding the convex portion; a light detecting domain formed on the convex portion of the substrate and having a convex top surface; a second conductivity-type high-concentration impurity area formed on the top surface of the light detecting domain; a gate insulating layer formed on the substrate excluding the light detecting domain; a transmission gate formed on the gate insulating layer; a planarization layer formed on the substrate including the transmission gate; and a microlens formed on the planarization layer above a photodiode.

Method of making charge-coupled device with microlens

Charge coupled device with microlens

A method of manufacturing a color charge-coupled device is disclosed including the steps of alternately forming a plurality of light detectors corresponding to first to third colors and a plurality of charge transmission regions on a semiconductor substrate; forming a pad on one side of the substrate excluding a portion where the light detectors and charge transmission regions are formed; forming a planarizing film on the substrate excluding the pad; coating a microlens material on the planarizing film and patterning the microlens material so as to be left only on the planarizing film above the light detectors; thermally flowing the microlens material, to thereby form microlenses on the planarizing film above the light detectors; and hard-baking first to third dyeing layer, to thereby form first to third color filter layers on each microlens excluding the edge portion.

Color charge-coupled device and method of manufacturing the same

A charge coupled device image sensor which can prevent smear and improve sensitivity, including a substrate of a first conductive type, a first well of a second conductive type formed on one side of said substrate, a second well of the second conductive type formed on the other side of said substrate, a pair of photo-detecting areas formed adjoining in said first well, a pair of charge transfer areas formed close to each photo-detecting area and adjoining in said second well, a channel stop area formed between said adjoining photo-detecting areas and said charge transfer areas and for isolating each of the areas,.respectively, high-density impurities areas of the second conductive type being formed on the upper surface of said photo-detecting area, a gate insulation film formed on the whole substrate, a pair of transfer gates formed on said gate insulation film at the upper side of each charge transfer area, a insulation film for encompassing said transfer gate and being formed on said gate insulation film except said pair of photo-detecting areas, a light-shading film formed on said insulation film except said pair of photo-detecting areas, a leveling substrate formed on the whole substrate, and, a micro lens formed said leveling substrate at the upper side of said pair of photo-detecting areas.

Growing community of inventors

Chungcheongbuk-do, South Korea

Chul Ho Park