The Penn State Research Foundation

Chuanying Shen

Thomas R Shrout

Shujun Zhang

A high temperature piezoelectric sensor device such as a high temperature accelerometer, force sensor, pressure sensor, temperature sensor, acoustic sensor and/or acoustic transducer for use at temperatures up to 1000&#xb0; C. The high temperature device includes a base, a piezoelectric element attached to the base and a pair of electrodes in electrical communication with the piezoelectric element. The piezoelectric element can have a dpiezoelectric coefficient between 16.0-18.0 pC/N for all temperatures between 25 to 700&#xb0; C., and a rotated dpiezoelectric coefficient of 8.0-9.5 pC/N with zero face shear/thickness shear piezoelectric coefficients d. dand din the same temperature range. The piezoelectric element can also have an electromechanical coupling factor kvariation of less than 7%, and dand rotated dpiezoelectric coefficient variations of less than 5% for temperatures between 25 to 700&#xb0; C. The piezoelectric element can have high electrical resistivity, being on the order of &#x3e;10&#x3a9;&#xb7;cm at 600&#xb0; C. The piezoelectric element can be an ABCOpiezoelectric material with a Fresnoite structure and A=Ca, Sr, Ba, Mg; B&#x2550;Ti, Zr, Hf, V; and C&#x2550;Si, Ge, Sn.

High temperature sensors and transducers

A high temperature piezoelectric sensor device such as a high temperature accelerometer, force sensor, pressure sensor, temperature sensor, acoustic sensor and/or acoustic transducer for use at temperatures up to 1000&#xb0; C. The high temperature device includes a base, a piezoelectric element attached to the base and a pair of electrodes in electrical communication with the piezoelectric element. The piezoelectric element can have a dpiezoelectric coefficient between 16.0-18.0 pC/N for all temperatures between 25 to 700&#xb0; C., and a rotated dpiezoelectric coefficient of 8.0-9.5 pC/N with zero face shear/thickness shear piezoelectric coefficients d. dand din the same temperature range. The piezoelectric element can also have an electromechanical coupling factor kvariation of less than 7%, and dand rotated dpiezoelectric coefficient variations of less than 5% for temperatures between 25 to 700&#xb0; C. The piezoelectric element can have high electrical resistivity, being on the order of &#x3e;10&#x3a9;&#xb7;cm at 600&#xb0; C. The piezoelectric element can be an ABCOpiezoelectric material with a Fresnoite structure and A=Ca, Sr, Ba, Mg; B=Ti, Zr, Hf, V; and C=Si, Ge, Sn.

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Chuanying Shen