Taiwan Semiconductor Manufacturing Comp. Ltd.

Chuan-Wei Chen

Yao-Hwan Kao

Ching-Hai Yang

Shang-Sheng Li

Kuo-Pin Chen

Hsiang-Kai Tseng

A spin dispenser module and methods for using the same is disclosed. The spin dispenser module includes a cup having a basin with sidewalls and an exhaust, a rotatable platform situated inside the cup adapted for holding and rotating a substrate, a liquid dispenser disposed over the rotatable platform for dispensing a liquid coating material on top of the substrate, one or more ejector inlets disposed over the rotatable platform, the one or more ejectors connected to a negative pressure source, and a motor coupled to the rotatable platform to rate the rotatable platform at different rotational speeds. The one or more ejector inlets may be translatable and/or rotatable with optionally adjustable suction pressure. The ejector inlets operate after a liquid coating material is dispensed to avoid deposition of suspended organic compounds after a coating is formed.

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Hsinchu, Taiwan

Chuan-Wei Chen