Powertech Technology Inc.

Chu Yuan Mo

Cheng Chun Chang

Yuan-Jung Lu

Ming Hsiu Hsieh

Fu-Hsiang Chang

A wafer transferring device adapted to suck and transfer a first wafer is provided. The wafer transferring device includes an arm and a supporting carrier. The supporting carrier is connected to the arm. The supporting carrier has a single vacuum suction port exposed to an upper surface of the supporting carrier. The supporting carrier is adapted to move to a position below the first wafer. The single vacuum suction port is adapted to suck a first central region of the first wafer so as to lift up and transfer the first wafer.

Wafer transferring device

A method of detecting abnormal test signal channel of automatic test equipment firstly obtains a raw test data and then divides into the data groups according to a mapping data. The test data of DUTs in one data group are generated by the same group of probes. A yield of each data group is further estimated. A yield of a wafer is further estimated when the yield of the data group matches a first failure threshold. An abnormal test signal channel is determined when the yield of the wafer does not match a second failure threshold or the yield of the wafer matches the normal threshold. Therefore, to add the detecting method in an original test procedure of the ATE, the operator easily identifies which blocks in the failure color on the test data map are caused by the abnormal test signal channel.

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Hsinchu County, Taiwan

Chu Yuan Mo