Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,341 patents)
2. L'air Liquide, Société Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude (1 from 1,435 patents)
1 patent:
1. 9012331 - Etching method and non-transitory storage medium