Nikon Corporation

Nikon Research Corporation of America

Christopher S Margeson

Douglas C Watson

Fardad A Hashemi

Michael B Binnard

Travis D Bow

A mirror assembly () for directing a beam () includes a base (), and an optical element () that includes (i) a mirror (), (ii) a stage () that retains the mirror (), (iii) a mover assembly () that moves the stage () and the mirror () relative to the base (), and (v) a thermally conductive medium () that is positioned between the stage () and the base () to transfer heat between the stage () and the base (). The thermally conductive medium () has a thermal conductivity that is greater than the thermal conductivity of air. The thermally conductive medium () can include an ionic fluid or a liquid metal.

Mirror assembly with heat transfer mechanism

A substrate stage is provided with an immersion liquid collection member that surrounds at least an alignment feature of the substrate stage used to align the substrate on the stage by engaging alignment structure of the substrate. The collection member is located at least partly below the periphery of the substrate held by the substrate holding member of the substrate stage. The collection member has an uppermost liquid-receiving surface that preferably is spaced below a lowermost surface of the substrate when the substrate is held by the substrate holding member. The collection member collects liquid that flows along the alignment feature so as to prevent that immersion liquid from flowing along the under-surface of the substrate.

Apparatus and methods for inhibiting immersion liquid from flowing below a sustrate

An exemplary device includes first and second portions that are movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region. When the overlap region is compressed, displacement of the first and second portions relative to each other is prevented so as to provide relatively high stiffness in first and second orthogonal directions (e.g., z- and y-directions) and relatively low stiffness in a third orthogonal direction (e.g., x-direction). The device can be used in coordination with an actuator, wherein operation of the actuator and compression of the overlap region are automated.

Multiple-blade holding devices

A precision assembly () for fabricating a substrate () includes a precision fabrication apparatus (), a pedestal assembly () and a suspension system (). The precision fabrication apparatus () fabricates the substrate (). The pedestal assembly () supports at least a portion of the fabrication apparatus (). The suspension system () inhibits the transfer of motion between the mounting base () and the pedestal assembly (). The suspension system () can include (i) a first boom () that is coupled to the mounting base () and the pedestal assembly (), the first boom () being pivotable coupled to at least one of the mounting base () and the pedestal assembly (), and (ii) a first resilient assembly () that is coupled between the mounting base () and at least one of the first boom () and the pedestal assembly (). The first resilient assembly () can function similar to a zero length spring over an operational range of the resilient assembly (). With this design, the components of the precision fabrication apparatus () are better protected by the suspension system () during a seismic disturbance. This reduces the likelihood of damage and misalignment of the components of the precision fabrication apparatus () during the seismic disturbance.

System for isolating an exposure apparatus

Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.

Conforming seats for clamps used in mounting an optical element, and optical systems comprising same

Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.

Iron core motor driven automatic reticle blind

Forces are minimized in an object supported relative to a surface by providing a first, preferably static force sufficient to retain the object is position when at rest, preferably through a clamping arrangement having a first actuator, measuring or predicting an acceleration and applying a second, preferably dynamic force corresponding to the acceleration. The first and second forces are preferably arranged to be additive or reinforcing but the arrangement can be made fail-safe at the expense of increased power consumption by arranging the first force in accordance with the maximum anticipated acceleration and counteracting the first force with the second force for lesser or zero accelerations. The second force is preferably provided by a clamp of arbitrary configuration which can be moved into and out of engagement with the object. By minimizing forces applied to the object in such a manner, damage such as creep and propagation of crystal lattice dislocations over time can largely be prevented.

Acceleration clamp assist

A wavefront aberration correction system for an adaptive optic such as a deformable mirror uses many correction units, each having a force-applying member attached to the back surface of the adaptive optic at a specified position and an actuator connected to it through a force-communicating device. The actuators are disposed outside the perimeter of the adaptive optic. The force-communicating device may include a lever or a bell-crank supported rotatably around a pivot such as a flexural pivot and redirects the force of the actuator.

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Sunnyvale, CA, United States of America

Christopher S Margeson