Linde Aktiengesellschaft

Linde Gmbh

Christopher Rand

Jim Fieret

Derrick Ernest Hilton

Walter Mark Veldsman

Sreenivas Viyyuri

A sensor module for connection between a fabrication tool and the head of the fabrication tool. The sensor module has an interface connectable to the fabrication tool, having: a power port for receiving power transmitted by the fabrication tool to the head, a gas port for receiving gas delivered by the fabrication tool to the head, and another interface connectable to the head which has another power port for delivering power to the head, another gas port for delivering gas, from the first gas port, to the head. The module also has a sensor module having a memory, a sensor for measuring power transmitted to the head, another sensor for measuring the gas delivered to the head, a device for transmitting information between the sensor module and a remote location, and a processor electronically connected to the memory, transmission device, and sensors.

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East Clandon, United Kingdom

Christopher Rand