US Government As Represented by the Secretary of the Army

Christopher Michael Waits

Ronald G Polcawich

Sarah Salah Bedair

Reza Ghodssi

Ivan C Lee

Bruce Robert Geil

Brendan M Hanrahan

Luz M Sanchez

Nicholas Robert Jankowski

Mustafa I Beyaz

Gabriel I Smith

A physical structure and a method for forming a electronic devices on a substrate comprising: providing a substrate; forming a plurality of layers on the substrate, the layers comprising at least two layers of conducting material and a layer of insulating material therebetween; depositing photoresist material onto predetermined regions of the plurality of layers, the photoresist material varying in thickness; utilizing gray scale illumination on the photoresist material; removing a portion of the layers using physical etching to expose predetermined portions of the conducting layers. Optionally, the photoresist may be utilized on a plurality of discrete electronic devices concurrently, such that the gray scale illumination is conducted on a plurality of discrete electronic devices concurrently. Similarly, the physical etching may be conducted on the discrete electronic devices concurrently; removing different thicknesses of material concurrently. Also claimed is a product made by the claimed method.

Electronic device structure and method of making electronic devices and integrated circuits using grayscale technology and multilayer thin-film composites

Methods and apparatus for forming an electromechanical device are disclosed. In some embodiments, an electromechanical device includes a first substrate; a second substrate; a rotor movably disposed in the first and second substrates and having a plurality of first turbine blades disposed on a first side of the rotor and a plurality of permanent magnets disposed on a second side of the rotor, wherein the plurality of permanent magnets are arranged about a central axis of the rotor, wherein adjacent permanent magnets have opposing magnetic poles; a channel disposed between the first and second substrates and a peripheral edge of the rotor; a plurality of microballs disposed in the channel to provide a bearing for the rotor; a third substrate disposed proximate the second side of the rotor and having a plurality of coils disposed therein such that rotation of the rotor induces current the plurality of coils.

Ball bearing supported electromagnetic microgenerator

A compact multi-functional fuel converter and a process for converting liquid fuel to a product, which includes providing a supply of oxygen gas, providing a supply of liquid fuel, electrically atomizing the fuel, evaporating the fuel and catalytically reacting the liquid fuel and oxygen in the reactor.

Multi-functional compact fuel converter and a process for converting liquid fuel

A process for forming an integrated multiplex electrospray includes forming multiple holes in a ring extractor substrate to create a ring extractor. A nozzle array having multiple nozzles each nozzle defining a central axis is provided. A spacer layer is bonded to either the ring extractor or the nozzle array to form a bonded stack. The bonded stack is then aligned with remaining layer to align each of the multiple nozzles with one of the plurality of holes to less than 10 microns from concentric and the spacer layer then bonded intermediate between the ring extractor and the nozzle array layer. The spacer layer is then etched to provide fluid communication between multiple nozzles and the multiple holes of the ring extractor and form the spacer.

Process of forming an integrated multiplexed electrospray atomizer

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Silver Spring, MD, United States of America

Christopher Michael Waits