Exajoule LLC

Other

Nayna Networks, Inc.

Exajoula, LLC

Christopher M Aubuchon

Sascha Hallstein

Steven Dean Gottke

Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

Micromirror systems with electrodes configured for sequential mirror attraction

A reliable micromirror device for imaging applications is presented. The device includes a projection lens assembly and an array of micromirrors for fast and efficient color separation and projection. Each of the micromirrors simultaneously receives a plurality of light beams. The position of a micromirror in the array of micromirrors is adjustable such that the micromirror selects one of the plurality of light beams to direct toward the projection lens assembly. Each micromirror also has an 'off' position where none of the reflected light beams is directed toward the projection lens assembly. An image is formed when each of the micromirrors in the array either directs one of the light beams toward the projection lens assembly or is turned 'off.' The device may include a total internal reflection prism assembly that separates the light beams for improved contrast.

Multiple beam-directing micromirror device

Micromirror systems with concealed multi-piece hinge structures are provided for reflective applications. Generally, light is reflected by these structures adapted for three-dimensional tilt as well as up-and-down or out-of-plane actuation. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable solutions for use in optical switching, projection and other applications, especially optical applications.

Micromirror systems with concealed multi-piece hinge structures

Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.

Multi-tilt micromirror systems with concealed hinge structures

Micromirror systems with side-supported mirrors and concealed flexure members

Micromirror systems with open support structures

A method (and system) for manufacturing an optical switching device. The method includes forming an array plate comprising at least one hundred sites from a first physical process, where each of the sites is for coupling to an optical fiber. The sites have a first spatial degree of error relative to an ideal mathematical grid of the sites. The first spatial degree of error is derived from at least the first physical process. The method forms a lens plate comprising a plurality of lenses from a second physical process. Each of the lenses is going to be coupled to at least one of the sites on the array plate. The lenses have a second spatial degree of error relative to a second mathematical grid of lenses. The second spatial degree of error is derived from at least the second physical process. The method then derives lens measurement values from each of the plurality of lenses. The method compares each of the site measurement values with its respective lens measurement value to determine an error measurement between the lens measurement values and the respective site measurement values at a first reference point. The method then shifts the site measurement values relative to the lens measurement values by a selected increment relative to the first reference point. The selected increment is an x-direction, a y-direction, or a theta direction, or any combination of these. The method repeats the comparing to derive an other error measurement after the site measurement values have been shifted and continuing to perform the comparing and shifting in an iterative manner to reduce and/or possibly minimize the error measurement between the site measurement values with its respective lens measurement values.

Growing community of inventors

Palo Alto, CA, United States of America

Christopher M Aubuchon