Kla Tencor Corporation

Kla-tencor Technologies Corporation

Christopher Kirk

Jim W Li

Earl M Jensen

Aspects of the present disclosure describe an inspection apparatus which performs inspection on a smaller field of a wafer with structures for current collection. The defective via holes may be located based on the collected current. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Defect inspection apparatus, system, and method

A lamp, a method of making a bulb for a lamp and an optical apparatus are disclosed. The lamp may include an anode and cathode disposed within a bulb. The bulb may include an optically refractive wall that is rotationally symmetric about an axis. A thickness of the wall may decrease with increase in azimuthal angle between an equatorial plane of the bulb and a point on the bulb's surface. The apparatus may include the lamp and an ellipsoidal reflecting surface. An alternative apparatus may include an ellipsoidal reflecting surface and a lamp having an anode and cathode within a bulb. A gap between the anode and cathode may be proximate a focus of the reflecting surface. The bulb may include an optically refractive wall configured such that a 0.24/0.13 NA power ratio for bulb light coupled to the interior ellipsoidal reflecting surface is between about 3.0 and about 3.3.

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Beaconsfield, United Kingdom

Christopher Kirk