Entegris, Inc.

Mykrolis Corporation

Christopher J Wargo

J Karl Niermeyer

Jieh-Hwa Shyu

Craig L Brodeur

William Basser

Thomas Leblanc

Richard L Miller

Stephen Guerrera

Joseph E Smith

Andrew Galpin

Gastón De Los Reyes

Eric McNamara

Jeffrey M Campbell

David Trio

Karl Niermeyer

Rakesh Kumar Singh

A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded from a two piece mold and the openings can have draft angles to facilitate the molding process.

Molded rotatable base for a porous pad

A pad conditioner for a CMP polishing pad is disclosed that includes a substrate that has a matrixical arrangement of protrusions that have a layer of poly crystalline diamond on at least their top surfaces. The protrusions may have varying shapes and elevations and may comprise a first set of protrusions and a second set of protrusions, the first set of protrusions have a first average height and the second set of protrusions have a second average height, the first average height different from the second average height, a top of each protrusion in the first set of protrusions has a non-flat surface and a top of each protrusion in the second set of protrusions has a non-flat surface.

Chemical mechanical planarization pad conditioner

Chemical mechanical planarization conditioner

A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded form a two piece mold and the openings can have draft angles to facilitate the molding process.

Substrate cleaning brush

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.

Fluid flow measuring and proportional fluid flow control device

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a valve can be adjusted by application of fuzzy logic which involves quantizing input variables into the degree to which a small set of logical values is true. In one embodiment, variables related to flow rate and change in flow rate over time can be compared to membership functions to generate fuzzy inputs, based upon which fuzzy outputs can be generated.

The present invention include non-porous adherent coatings of chemically inert high purity poly-oligomers deposited on substrates. The coatings are applied and cured on the substrates at relatively low temperatures which permits the coating process to be performed with temperature sensitive structures such as magnets, electronic circuits, electrodes, and bonding pads in place on the substrate. Coated substrates, such as sensors and fluid conduits, have an effective thickness of the protective non-porous coating that is chemically bonded to a surface of the substrate that will be contacted with a fluid. The adherent non-porous coating on the substrate protect it from corrosion, particle generation, swelling, or delamination caused by contact with the fluid.

Non-porous adherent inert coatings and methods of making

The present invention provides restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration.

A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

Connector apparatus and system including connector apparatus

A connector apparatus is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

Growing community of inventors

Wellsley, MA, United States of America

Christopher J Wargo