Entegris, Inc.

Mykrolis Corporation

Millipore Corporation

Entegris, In.

Christopher J Vroman

Robert S Zeller

Nathan Abbott

Rajnikant B Patel

Eric McNamara

Anthony DiPrizio

Patrick Doering

Chester L Bejtlich

David Trio

Chintan Patel

Marshall Randolph

Matthew B Nicolas

Bradley H Wood

A method of packaging a CMP brush having a cylindrical brush portion and a pair of end connection portions. The method includes saturating the brush with a liquid; covering the cylindrical brush portion with a flexible sheet that extends around and engages the surface of the cylindrical portion; engaging each of the end connection portions with a respective end support; inserting the dampened brush into a rigid polymer tubular shipping container and supporting the end connection portions within the polymer tube; and providing an additional exterior self-supporting packaging.

CMP brush packaging

An apparatus and method for maintaining low gas velocity variation across a diffuser membrane during the vent-up of a vacuum chamber is disclosed. The diffuser membrane permeability and the pressure conditions across the membrane are chosen to minimize variation in gas flow velocity through the membrane during the vent-up cycle. This reduces re-distribution of particles from a vacuum chamber onto sensitive substrates in the vacuum chamber during vent-up from sub-atmospheric pressure to atmospheric pressure.

Apparatus and method for reducing particle contamination in a vacuum chamber

Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Low-profile surface mount filter

The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.

Porous sintered composite materials

A gas porous media which comprises a material having a low coefficient of thermal expansion that is capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cmwhile demonstrating a permeability of 3.5&#xd7;10mand a porosity of around 62% is disclosed. The porous media can be fabricated into a frame that is capable of retaining 99.9999999% of particles greater than 0.003 &#x3bc;m in diameter at 8.3 sccm/cmwith a permeability of 3.0&#xd7;10mand a porosity of around 53%. The porous medias can be tailored by changing the raw materials and process to yield media with a range of porosities and that exhibit permeability between 1.0Eand 1.0Em. The porous media are used in frames for supporting a pellicle and a reticle in a parallel relationship to each other. The frames may comprise porous media in its entirety or the porous media can be fabricated and sealed into a solid support frame.

Membrane and reticle-pellicle apparatus with purged pellicle-to-reticle gap using same

A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material. The present dendritic particles can be of high purity, and substantially free of carbon contamination.

Method for forming chromium anisotropic metal particles

Method for forming anisotrophic metal particles

Method for forming titanium anisotropic metal particles

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Natick, MA, United States of America

Christopher J Vroman