Other

Reeves Brothers, Inc.

Dupont Air Products Nanomaterials, LLC

Osmose, Inc.

Christopher G Hayden

Robert J Small

Robert L Hodge

Michael P Pompeo

Donald William Frey

A Keith Dye

Bruce Tredinnick

Ronald M Buono

Joseph Carl Kalchbrenner

Dwight W Glover

Wayne H Richardson

The invention generally relates to compositions and methods for chemically mechanically polishing a substrate, including a polishing accelerator, which is normally one or more oxidizers, an abrasive material, and chelating particles and/or metal-absorbent clay material. In addition, the invention can also involve methods of forming chelator particles and methods of separating metal-containing ions from polishing and/or etching solutions after polishing and/or etching.

Particulate or particle-bound chelating agents

The use of mixed cerium-containing synthetic solid abrasive materials in chemical mechanical polishing slurries can provide better selectivity, better substrate removal rates, or lower defect rates than conventional ceria slurries. The slurries have abrasive particles that include a plurality of solid cerium-containing phases selected from CeO, CeO, cerium-nitride material, cerium-fluoride material, and cerium-sulfide material, where different cerium-containing materials are present in different particles or on the same particles.

Cerium oxide abrasives for chemical mechanical polishing

A printing blanket is constructed by electrostatically spraying one or more solvated elastomers onto a sleeve structure. A printing blanket can therefore having a sleeve and at least one layer, said layer comprising first and second compositions that are distinct from one another, wherein the boundary between the compositions is a gradient extending at least 0.002 inches. Another aspect of the invention relates to a method of electrostatically spraying elastomeric material onto printing blankets.

Spray coating method of producing printing blankets

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Alexandria, VA, United States of America

Christopher G Hayden