International Business Machines Corporation

Christopher E Obszarny

Steven Alan Cordes

Christopher P Ausschnitt

Patrick Ronald Varekamp

Debra A Loussedes

An exemplary method for determining emotive tone in text, the method comprising, matching text in a text file with text entries in a control file database, wherein the formatting attributes include textual and non-textual indicators, receiving a first set of emotive values associated with the matching text entries from the control file database, calculating an emotive score with the first set of emotive values, assigning the emotive score to the text file, and displaying the emotive score of the text file.

Methods and systems involving text analysis

A monitor for electrically testing energy beam dose or focus of a layer formed on a substrate by lithographic processing. The monitor comprises a substrate having in a lithographically formed layer an array of electrically conductive elements comprising a plurality of spaced, substantially parallel elements having a length and a width, with the individual elements being electrically connected, and the lengths of the elements being sensitive to dose and focus of an energy beam in lithographically forming the layer. The monitor further includes at least one pad electrically connected to the array to apply current through the array elements. Upon applying a voltage across the array elements, the suitability of dose or focus of the lithographically formed layer may be determined by the resistance of the array. Preferably, ends of the individual elements are aligned along essentially straight lines to form an array edge.

Electrically testable process window monitor for lithographic processing

Disclosed are shielding platters for semiconductor wafers, and more particularly a reactive ion etch (RIE) chamber wafer masking system, wherein a mechanical mask facilitates the implementation of multiple etches on a single semiconductor wafer.

Reactive ion etch chamber wafer masking system

An adjustable, in-situ photolithography process is taught, where incident exposure light is passed through two polarizers; the first polarizer capable of altering its polarization direction, during exposure, relative to the polarization direction of the second polarizer, in order to enhance the contrast of a patterned image projected on a semiconductor wafer. The second polarizer in the optical train is a photo mask transparent substrate impregnated with colloidal crystals that are aligned in a fixed, predetermined direction by magnetic field. The photo mask may also contain a silicon compound for phase shifting the incident exposure light to further enhance the image contrast.

Apparatus and method for in-situ adjustment of light transmission in a

The present invention utilizes a sub-threshold exposure step on an optically sensitive resist that is applied to a semiconductor wafer to thin the resist below the thickness which can be achieved by normal spinning and/or thinning techniques. Furthermore, the thinned resist can be re-expose to UV energies so as to develop patterns on the surface of the semiconductor wafer. An apparatus for vibrating and rotating the resist during the sub-threshold step is also disclosed herein.

Growing community of inventors

Wellington, FL, United States of America

Christopher E Obszarny