National Technology & Engineering Solutions of Sandia, LLC

Christopher Dyck

David R Wheeler

Michael David Henry

Roy H Olsson

Matt Eichenfield

Kenneth Wojciechowski

David Bruce Burckel

Christopher Nordquist

Timothy N Lambert

Patrick Sean Finnegan

Cody M Washburn

Benjamin Griffin

Aleem Siddiqui

Lee Taylor Massey

Jennifer Marie Strong

The various technologies presented herein relate to formation of carbon micromechanical systems (CMEMS), wherein the CMEMS comprise multiple layers of carbon structures and are formed using a plurality of photoresist precursors that are processed to form carbon. The various embodiments can be utilized in producing a plurality of CMEMS with full production level fabrication, e.g., 6 inch wafers can be processed. A pyrolyzed layer of carbon is lithographically defined after pyrolysis, wherein the post-pyrolysis etch process can produce carbon structures having repeatable and accurate device geometries, with straight sidewalls. A sacrificial layer can be applied to facilitate separation of a first carbon layer from a second carbon layer, wherein, upon pyrolysis to form the second carbon layer and lithography thereof, the sacrificial layer is removed to form a CMEMS comprising a first carbon layer (e.g., comprising bottom contacts) located beneath a second carbon layer (e.g., a mechanical layer).

Fabrication of multilayered carbon MEMS devices

A radio frequency (RF) receiver comprises a passive impedance transforming voltage amplifier and a resonant, latching micromechanical switch having a deflectable bridge, an RF actuation electrode receivingly connected to the amplifier, and a DC bias electrode positioned to latch the switch in a closed position by electrostatic attraction when energized by a suitable voltage. The bridge is configured with a mechanical mode of vibration that periodically urges the switch toward the closed position.

Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals

Growing community of inventors

Albuquerque, NM, United States of America

Christopher Dyck