University of California

Christopher C Painter

Andrei M Shkel

David J Reinkensmeyer

Clifton T Pang

Due to restrictive tolerancing, structural imperfections that reduce performance of fabricated micro gyroscopes are typical. While feedback control is normally used to compensate for these imperfections, there are limitations to how large of errors for which this strategy can compensate without interfering with the performance of the sensor. A multi stage control architecture comprising in situ self-diagnostic capabilities, electronic 'trimming' of errors, and feedback control allows for the compensation of all magnitudes of errors without interfering with the performance of the device. The self-diagnostic capabilities include an algorithm for determining structural imperfections based on the dynamic response of the system. The feedforward portion of the control is used to 'trim' large imperfections, while the feedback portion compensates for the remaining non-idealities and small perturbations. A control architecture is shown in a gyroscope using nonlinear electrostatic parallel plate actuation.

Multi stage control architecture for error suppression in micromachined gyroscopes

A micromachined angle measuring gyroscope using a dual mass architecture measures angular positions rather than angular rates. The invention decouples the effects of drive and sense through the use of a dual mass architecture, and is comprised of a single lumped drive mass, which is structurally coupled to a second lumped slave mass, where the drive mass is electrostatically driven at the first resonant frequency the system using parallel plate electrodes. The slave mass is driven to higher amplitudes than the drive mass. In the presence of rotation, the line of oscillation in both masses precesses, which is easily detectable in the slave mass due to the amplified motion, and is exactly equal to the angle of rotation. The two illustrated embodiments are z-axis realizations of this principle, where the first device uses an inner drive/outer sense architecture and the second uses an outer drive/inner sense architecture.

Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same

A computer-based system provides arm movement therapy for patients with sensory motor impairments. The system is based off a web site that provides access to assessment and therapy exercises designed to test and improve motor coordination in the arm. It operates over the World Wide Web using client-side applets, and can track user movement recovery over time and report it to a remote server computer. The system can also be customized to provide a personalized program of therapeutic exercise to a multiplicity of individuals. A mass manufactured computer input device senses the user's movement and provides a means to track sensory motor performance.

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Irvine, CA, United States of America

Christopher C Painter