Phase Metrics, Inc.

Christopher A Lacey

Kenneth H Womack

Carlos A Duran

Edward W Ross

Semyon Nodelman

Ed Ross

A calibration medium that is used to calibrate a flying height tester which measures the gap of an air bearing formed between a magnetic recording head and a substrate. The medium contains a first ridge and a second ridge that extend from an underlying substrate. The ridges may be coated with a reflective material. A flying height tester can be calibrated by measuring light reflected from each ridge. The ridges have varying thicknesses so that the calibration medium will produce multiple data points.

Thin film flying height calibration disk for calibrating flying height

An efficient method and apparatus for taking the data needed for a glide test; the data includes measuring flying height of a slider over a regular rotating disk and measuring piezoelectric contact with the disk. An optical system provides a beam of light. To measure the flying height, part of the beam of light is reflected from a surface of the transparent slider. Another portion of the beam is reflected from the surface of a rotating disk. The two beams are transferred through an optical system and imaged onto a CCD camera which converts the separation of intensity maxima or intensity minima into information regarding the air gap separating the slider and the disk. A piezoelectric sensor on the slider measures slider contact with the disk. A processor combines data from the piezoelectric sensor with data from the CCD camera to measure disk asperities.

Optically verified glide

An apparatus and method for measuring the space between a transparent member such as a substrate, and reflective member such as a slider. The apparatus includes a first optical system which detects a first light beam that is reflected from the substrate and the slider. The reflected light is separated into four separate beams. The intensities of the beams are detected and utilized to determine a first stokes parameter, a second stokes parameter, a third stokes parameter and a fourth stokes parameter of the reflected light. The stokes parameters are used to compute the real index of refraction n, extinction coefficient k and the thickness of the space. The four stokes parameters account for any depolarized light that is reflected from the slider. The first optical system may have a photodetector which detects an image of the slider. The image provides multiple data points that can be used to calculate n, k and the thickness of the air gap without a retract routine. The apparatus may also have a second optical system which detects a second light beam reflected from the substrate and the slider. The second optical system can be used to dynamically measure a thickness of the space. In the combined system the first optical system may accurately measure the n and k of a slider area while the second optical system dynamically measures the thickness of the air gap.

Combined interferometer/ellipsometer for measuring small spacings

An apparatus and method for measuring the topographic profile of a reflective member having an index of refraction. The apparatus comprises a first optical system that reflects a light beam from the reflective member and detects the reflected light beam. A second optical system directs the light beam to interfere with the reflected light beam and detects the resulting interference pattern. A processor coupled to the first optical system and the second optical system computes the index of refraction of the reflective member from the detected reflected light beam and provides the topographic profile of the reflective member from the index of refraction and the interference pattern.

Combined interferometer/polarimeter

A tooling fixture that holds a head gimbal assembly (HGA) of a hard disk drive within a piece of test equipment. The tooling fixture includes a plurality of pads that extend from a top surface of a chimney. The HGA has a slider that is mounted to a flexure arm. The flexure arm extends from a base plate of the HGA. The base plate has a swage mount that is inserted into a corresponding aperture of the chimney when an operator loads an HGA into the tester. The pads of the chimney support the base plate and the HGA. The base plate is typically clamped onto the chimney by a spring biased clamp. The HGA is moved adjacent to a rotating disk of the tester. The pads provide a reliable contact surface that improves the repeatability of the HGA positioning which in turn can improve the tester.

Tooling for holding a head gimbal assembly

A slider is mounted to a rotary drive mechanism. The slider is loaded, i.e., moved toward and positioned near a disk surface, by rotary movement of the rotary drive mechanism in a first rotary direction. Similarly, the slider is unloaded, i.e., moved away from the disk surface, by rotary movement of the rotary drive mechanism in a second rotary direction which is the reverse direction of the first rotary direction.

Method and apparatus for rotary load/unload slider positioning

An apparatus and method for measuring the space between a transparent member such as a disk, and reflective member such as a slider, by detecting a change of polarization of a reflected light beam. The apparatus includes a light source that emits a light beam. The light beam is circularly polarized and directed onto the disk and reflected off of the interface between the disk and the slider. The reflected light beam is split into four separately polarized beams by a beam splitter/polarizer assembly. The four light beams have varying intensities that are measured by photodetectors. Stokes parameters are computed from electrical signals that are generated by the photodetectors. The Stokes parameters correlate to the change in polarization of the reflected light beam. Ellipsometric parameters delta and psi are computed from the Stokes parameters. The thickness of the space and the complex index of refraction (n and K) of the slider are computed from the delta and psi parameters, typically by computing two separate sets of ellipsometric parameters at two different spacing thicknesses.

Imaging polarimeter detector for measurement of small spacings

Light is focused on an interface between a transparent probe and a surface to be analyzed. The probe is lowered onto the surface using a computer-controlled actuator. Light reflected from the surface of the probe which is closest to the surface and the surface itself recombines, producing interference effects from the spacing between the probe and the surface over a 2-dimensional area. Since the shape of the probe in known beforehand, the profile of the surface can be readily calculated from the 2-dimensional measurement of the spacing between the probe and the surface. This surface profile indicates the roughness of the surface. The surface hardness and other surface properties can be measured by pressing the probe onto the surface. The contact load between the probe and the surface is detected by a load cell. The force with which the probe is being pressed onto the surface is measured using the load cell. The surface profile can continue to be measured interferometrically while it is being deformed by the probe. The measurement of surface deformation as a function of contact pressure allows the measurement of surface hardness while causing a minimum amount of damage to the surface.

Method and apparatus for measurement of roughness and hardness of a

The apparatus and method for measuring a small spacing down to contact uses an interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic or quasi-monochromatic interference patterns caused by a spacing between two articles, one of which is transparent. The intensity calibration is done by measuring maximum and minimum fringe intensity of each color while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from interferometric theory.

Growing community of inventors

San Diego, CA, United States of America

Christopher A Lacey