J.a. Woollam Co.

J.a. Woollan Co., Inc.

J.a. Wooliam Co., Inc.

Van Derslice, Jeremy, A.

Goeden, Christopher, A.

Liphardt, Martin M.

Christopher A Goeden

Martin M Liphardt

Blaine D Johs

Ping He

John A Woollam

James D Welch

Galen L Pfeiffer

Craig M Herzinger

Jeffrey S Hale

Steven E Green

Jeremy A Van Derslice

Brian D Guenther

Jeremy A Vanderslice

A system for and method of investigating changes in optical properties of a porous effective substrate surface related to, for instance, effective surface depth and refractive index, pore size, pore volume and pore size distribution at atmospheric pressure.

System and method for investigating change in optical properties of a porous effective substrate surface as a function of a sequence of solvent partial pressures at atmospheric pressure

A system and method of substantially achromatically controlling the intensity of a spectroscopic beam with application in spectrophotometers, reflectometers, ellipsometers, polarimeters or the like systems.

System and method of controlling intensity of an electromagnetic beam

Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.

Automated ellipsometer and the like systems

A substantially self-contained 'on-board' material system investigation system for effecting relative translational and rotational motion between a source and detector of electromagnetic radiation and a sample, which system is functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a sample, including the capability to easily and conveniently effect rotation and/or to change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface and/or to provide gas flow confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and/or NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.

Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems

System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems.

Sample orientation system and method

An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a first range of wavelengths, (eg. the Visible wavelengths), and simultaneously relatively emphasizing intensity in another wavelength range, (eg. UV wavelengths).

Beam chromatic shifting and directing means

Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount.

System for and method of investigating the exact same point on a sample substrate with multiple wavelengths

System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least two wavelengths at various positions thereof with respect to a sample, including analyzing data obtained at those wavelengths.

A system for stabilizing the angle of incidence a beam of electromagnetic radiation from a vertically oriented Arc lamp onto a horizontally oriented sample surface.

Control of uncertain angle of incidence of beam from Arc lamp

A substantially self-contained 'on-board' material system investigation system functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a large sample, including the capability to easily and conveniently change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface.

Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.

Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like

System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.

System and method for setting and compensating errors in AOI and POI of a beam of EM radiation

An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while de-emphasizing visual wavelength intensity and simultaneously emphasizing both IR and UV wavelength intensities, applied in ellipsometer or polarimeter and the like systems.

Growing community of inventors

Lincoln, NE, United States of America

Christopher A Goeden