Centre National De La Recherche Scientifique

Societe Francaise De Detecteurs Infrarouges-sofradir

Christophe Pautet

Arnaud Etcheberry

Isabelle Gerard

Alexandre Causier

A method for removing the growth substrate of a circuit of electromagnetic radiation detection, especially in the infrared or visible range, said detection circuit including a layer of detection of said radiation made of HgCdTe obtained by liquid or vapor phase epitaxy or by molecular beam epitaxy, said detection circuit being hybridized on a read circuit. The method includes submitting the growth substrate to a mechanical or chem.-mech. polishing step or to a chemical etch step to decrease its thickness, all the way to an interface area between the material of the detection circuit and the growth substrate; and submitting the interface thus obtained to an iodine treatment.

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Saint Marcel Bel Accueil, France

Christophe Pautet