Recif, Societe Anonyme

Sysmeca Ingenierie

Christophe Lero

Alain Gaudon

Pierre Astegno

A device () picks up at least one semi-conductor wafer () from a container () of wafers fitted on one side () of an aperture () in the transfer station () of a semi-conductor wafer processing plant. The device is on the opposite side () of the aperture and the pick-up is effected through it. The device incorporates a shutter () movable between open and closed positions. A wafer picking up means () is attached to the shutter and is designed to enter partially within the container below a wafer and seize the wafer by its edge. A pick up moving means () moves the picking up means () back and forth through the aperture ().

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Leguevin, France

Christophe Lero