Sextant Avionique

Christophe Legoux

Isabelle Thomas

Pierre O Lefort

Henri Fima

A resonator microaccelerometer sensitive to accelerations along a first direction is formed from a thin plate whose plane comprises the first direction and a second direction perpendicular to the first direction and that is orthogonal with a third direction. The microaccelerometer comprises a fixed frame; a seismic mass; two hanging legs; and two resonator beams. The hanging legs extend substantially along the second direction, each leg being directed toward the center of gravity of the mass, symmetrically with respect to this center; the resonator beams are parallel, but non collinear, and are symmetrical with respect to the center of gravity of the mass.

Microaccelerometer with temperature-compensated resonators

A capacitive micro-sensor includes a sandwich of at least two silicon plates. A peripheral stripe of each side of one plate is assembled to a corresponding stripe of the opposing surface of an adjacent plate through an insulating layer. The lateral sides of the sandwich are provided with notches partially penetrating in each of the insulating layers, and are thicker than the thickness of the insulating layers.

Capacitive micro-sensor with a lateral protection and manufacturing

A capacitive micro-sensor includes a sandwich of three silicon wafers, a peripheral stripe of each surface of the central plate being assembled to a corresponding stripe of an opposing external plate through an insulating layer. At least one of the external plates forms a first electrode, the central plate forms a second electrode and at least one portion of the central plate forms a variable capacity with at least one of the external layers. At least one of the insulating layers is formed by a sandwich of a first insulating layer, a conductive layer and a second insulating layer, the conductive layer being associated with connection means.

Capacitive micro-sensor with a low stray capacity and manufacturing

A capacitive micro-sensor includes a sandwich of three silicon plates, each surface of the frame region of the central plate being assembled to the opposing surface of each external plate through a thin layer forming an insulating stripe. At least one of the external plates forms a first electrode, and at least one central portion of the central plate forms a variable capacity with at least one of the external plates. The frame region of the central plate is electrically disconnected from the central portion. First contact means are coupled to the frame portion. Second contact means are coupled to the central portion and form a second electrode of the variable capacity.

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Valence, France

Christophe Legoux