Commissariat a L'energie Atomique Et Aux Energies Alternatives

Commissariat À L'énergie Atomique Et Aux Énergies Alternatives

Christophe Jany

Salim Boutami

Fabrice Nemouchi

Bertrand Szelag

Philippe Rodriguez

Elodie Ghegin

A process for producing a component includes a structure made of III-V material(s) on the surface of a substrate, the structure comprising at least one upper contact level defined on the surface of a first III-V material and a lower contact level defined on the surface of a second III-V material, comprising: successive operations of encapsulation of the structure with at least one dielectric; making primary apertures in a dielectric for the two contacts; making secondary apertures in a dielectric for the two contacts; at least partial filling of the apertures with at least one metallic material so as to produce upper contact bottom metallization and at least one upper contact pad in contact with the metallization for each of said contacts. A component produced by the process is also provided. The component may be a laser diode.

Process for producing a component comprising III-V materials and contacts compatible with silicon process flows

A photonic circuit including a structure of coupling to an external device, the structure including a main waveguide and at least two secondary waveguides, each secondary waveguide having a first portion substantially parallel to the main guide arranged in the vicinity of the main guide to perform an evanescent wave coupling between the main guide and the secondary guide, the first portion extending in a second portion having an end opposite to the first portion defining a coupling surface of the secondary guide, emerging at the level of an external surface of the circuit.

Structure for coupling a photonic circuit to an external device

Growing community of inventors

Chambery, France

Christophe Jany