Ceos Corrected Electron Optical Systems Gmbh

Christoph Weissb&auml;cker

Harald Rose

Stephan Uhlemann

An electrostatic corrector with a rectilinear optical axis has two corrective parts, which are arranged one behind the other along the optical axis and which have respective quadrupole fields and superimposed circular lens fields. The astigmatic intermediate image of one cross-section that is created by an axis point lies in one corrective part and the astigmatic intermediate image of the other cross-section, which is perpendicular to the first cross-section, lies in the other corrective part. An object of the invention is to eliminate the chromatic aberration of particle lenses. To achieve this, an electrostatic corrector is used, which includes two corrector units having similar instrumental construction, with each of the two corrector units having input and output sides on which two additional electrostatic quadrupoles are located. The two corrector units represent the axial paths in a telescopic manner in a 1:1 representation. The two corrector units are arranged one behind the other along the optical axia and are rotated by 90&deg; about the optical axis relative to one another.

Growing community of inventors

Dieburg, Germany

Christoph Weissbäcker

Growing community of inventors

Dieburg, Germany

Christoph Weissb&auml;cker

Christoph Weissbäcker