Physik Instŕumente (pi) Gmbh & Co. Kg

Physik Instrumente Gmbh & Co. Kg

Christoph Stiebel

Alexej Wischnewski

Dieter Wienecke

Kurt Sinske

A method and device are disclosed for actuating a piezoelectric motor by two driving electrodes by applying periodic control voltages to the driving electrodes. A simplified closed-loop control of the piezoelectric motor is realized by reducing the static friction of a friction contact between a friction element of the piezo-electric motor and an output element to be driven by the friction element without a propulsion of the output element at the same time. In exemplary embodiments, the periodic control voltages are applied with a phase shift to the driving electrodes in a first step of the method, and in a second step of the method, the amplitude ratio of the periodic control voltages is changed with respect to the first step.

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Waldbronn, Germany

Christoph Stiebel