Leica Microsystems Lithography Gmbh

Lasos Lasertechnik Gmbh

Christoph Schaeffel

Erik Beckert

Ulf-Carsten Kirschstein

Ludwig Bergann

Ralf Malz

Volker Bornmann

Torsten Gramsch

Johannes Zentner

Eugen Saffert

Andrew Hoffmann

A device for injecting light into an optical wave guide orients a focused light beam using a manipulator. The manipulator includes an adjusting plate with an outer part, an inner part, and two spring arrangements between the outer part and the inner part that are independently adjustable along two co-ordinate axes, each spring arrangement having a parallel spring arrangement guiding parallel to a certain direction, and a preliminary spring mounted in series, a fixing screw, and an axially elastic fixing disk. The inner part can be moved in the X direction and in the Y direction, and the fixing disk can be pressed into the adjusting plate by the fixing screw screwed into the housing part, in the direction of the passage of the beam, such that the adjusted position of the inner part is fixed.

Device for injecting light into an optical wave guide

The invention refers to an arrangement for positioning substrates, in particular for positioning wafers, within a device that is provided for exposure of the substrates and/or for measurement on the substrates by means of radiation under high-vacuum conditions. The following are provided according to the present invention: a retention system ( ), displaceable on a linear guidance system ( ), for receiving the substrate, the guidance direction of the linear guidance system ( ) being oriented parallel or substantially parallel to the Y coordinate of an X, Y, Z spatial coordinate system; drives for limited modification of the inclination of the guidance direction relative to the Y coordinate; drives for limited rotation of the linear guidance system ( ), including the retention system ( ), about the guidance direction; and drives for parallel displacement of the linear guidance system ( ), including the retention system ( ), in the direction of the X coordinate, the Y coordinate, and/or the Z coordinate.

Six-axis positioning system having a zero-magnetic-field space

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Ilmenau, Germany

Christoph Schaeffel