Carl Zeiss X-ray Microscopy, Inc.

Christoph Graf Vom Hagen

Xiaochao Xu

A detection system for an x-ray or charged particle imaging system utilizes high bandgap, direct conversion x-ray detection materials. The signal of the x-ray/charged particle projection is recorded in a spatial light modulator such as a liquid crystal (LC) light valve. The light valve is then read-out by a polarized light optical microscope and a high speed camera. The camera is used to track the blooming spots in the light valve to resolve their intensity, and relate that intensity of the input x-ray photon or charged particle. This allows of spatially resolved, imaging, x-ray and/or charged particle spectrometer.

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Schwaebisch Gmuend, Germany

Christoph Graf Vom Hagen