Leybold Aktiengesellschaft

Balzers Und Leybold Deutschland Holding Ag

Christoph Braatz

Joachim Szczyrbowski

Anton Zmelty

A system of layers applied to a transparent substrate includes a first layer of an oxide such as ZnO or SnO.sub.2, a second layer of a substoichiometric oxide of Zn or Ta, a third layer of Ag or Cu, a fourth layer of a substoichiometric oxide of Ti, Cr, or Nb, and a fifth layer of similar composition as the first layer. The layers are preferably deposited by magnetron cathode sputtering in an atmosphere which consists of inert gas and, in the case of the oxide layers, a reactive gas.

Pane of transparent material having a low emissivity

In a multi-layer coating for a material of good transparency for visible light, with an emissivity e&lt;0.04 and a light transmission T.gtoreq.78% and with two silver layers of different thickness, three oxide coatings are provided, and very thin metal or metal suboxide coatings as blockers, the oxide layers being alloys of the metals SnMg, SnAl, SnZr, SnTi or SnTa.

Optical filter having multi-layer coating

Method for the manufacture of panes with high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation. The panes are coated by cathode sputtering. To the substrates S there is applied a first coating of a material of the oxide group ZnO, SnO.sub.2, In.sub.2 O.sub.3, TiO.sub.2, ZrO.sub.2, TaO.sub.5, SiO.sub.2, Al.sub.3 O.sub.3, or mixtures thereof, or of one of the nitrides AlN, Si.sub.3 N.sub.4 or their mixtures, or of aluminum oxynitride, titanium oxynitride, zirconium oxynitride or silicon oxynitride or their mixtures, in a thickness of 20 to 60 nm. A second layer 2 follows, of one of the metals Ag, Cu or mixtures thereof, in a thickness of 5 to 30 nm, a third layer 3 of one of the metals Pd or Pt or their mixtures, in a thickness of 0.2 to 5 nm, preferably 0.5 nm, and a fourth layer 4 which, as a metallic or suboxidic (less than stoichiometric) layer of one of the metals Ti, Cr or mixture thereof, or of an alloy with at least 15% of one of the metals, in a thickness of 0.5 to 5 nm, preferably 1.5 nm. Lastly, a fifth layer 5 is applied, of a metal that is the same as that of the first layer 1.

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Hainburg, Germany

Christoph Braatz