Vat Holding Ag

Christoph Böhm

Adrian Eschenmoser

Roman Steffen

Andreas Hofer

Daniel Seitz

Wolfgang Weiss

Michele Tronca

Kyle Axle Elford

Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.

Vacuum valve with position sensor

A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.

Vacuum valve system for a regulated operation of a vacuum process

A pneumatic valve drive () for a valve (), in particular for a vacuum valve, which has at least one pneumatic cylinder () with at least one piston () that is movably mounted in the pneumatic cylinder () and at least two cylinder cavities () arranged on opposite sides of the piston (). Each cylinder cavity () is connected to at least one pressure source for applying pressure to each cylinder cavity (). One of the pressure sources is a constant pressure source () for applying a constant pressure to the cylinder cavity () arranged on one of the sides of the piston, and one of the other pressure sources is a regulated pressure source () for applying a variably regulatable pressure to the cylinder cavity () arranged on the opposite side of the piston ().

Pneumatic valve drive

A vacuum valve including a valve housing with seat surrounding a first opening with a sealing surface is disclosed. A valve disk having a first disk section and a second disk section tightly mounted inside an outer boundary of the first disk that is movable parallel to an opening axis. A drive is connected to the first disk section. The first disk section includes a first bearing surface configured to contact the sealing surface in the closed position. The outer boundary has a radially inwardly oriented inner surface. The second disk section has a radially outwardly oriented outer surface configured to contact the inner surface sealing a second contact area. At least for determined radial angles about a center of the valve disk, a first radial distance from the center to the first bearing surface is shorter than a second radial distance from the center to the second contact area.

Vacuum valve for closing a flow path with a two-part valve disk

A vacuum valve system having a valve seat and a valve closure for closing the valve opening. At least two sealing faces are provided, a first sealing face is the valve seat around the valve opening, and a second sealing face is the valve closure. A drive unit coupled to the valve closure designed so that the valve closure can be adjusted to provide respective valve opening states and is movable from an open position to a closed position, in which the second sealing face is pressed in the direction of the first sealing face and the valve opening in a gastight manner. The vacuum valve system has an optical sensor unit, designed to detect an optical measurement signal and an optical detection axis of the optical sensor unit oriented so that the measurement signal can be detected, and can be produced in a test position.

Vacuum valve with optical sensor

The vacuum valve includes a closure member that can be moved, parallel to a longitudinal movement direction, between an open position in which it unblocks the valve opening and an intermediate position in which it covers the valve opening but is raised off the valve seat, and that can be moved, parallel to a transverse movement direction, between the intermediate position and a closed position in which it bears against the valve seat; a valve rod that bears the closure member is mounted for displacement parallel to the longitudinal and transverse movement directions; a displacement part rigidly connected to the valve rod; and a drive motor which rotates a driveshaft about an axis parallel to the longitudinal movement direction in order to move the closure member between the open position, the intermediate position and the closed position. The drive shaft has, in a first section, a longitudinal displacement cam member of a longitudinal displacement cam mechanism that interacts with a longitudinal displacement engagement member of the longitudinal displacement cam mechanism in order to move the closure member between the open position and the intermediate position, and has, in a second section, a transverse displacement cam member of a transverse displacement cam mechanism that interacts with a transverse displacement engagement member of the transverse displacement cam mechanism in order to move the closure member between the intermediate position and the closed position.

Growing community of inventors

Gams, Switzerland

Christoph Böhm