Texas Instruments Corporation

Other

Christoph A Wasshuber

Keith Alan Joyner

Gabriel George Barna

Majid Movahed Mansoori

Ramesh Venugopal

Olivier Alain Faynot

David Barry Scott

Freidoon Mehrad

Zhihao Chen

The present invention provides a single-electron transistor device. The device comprises a sourceand drainlocated over a substrateand a quantum islandsituated between the source and drain, to form tunnel junctionsbetween the source and drain. The device further includes a fixed-gate electrodelocated adjacent the quantum island. The fixed-gate electrode has a capacitance associated therewith that varies as a function of an applied voltage to the fixed-gate electrode. The present invention also includes a method of fabricating a single-electron device, and a transistor circuitthat include a single-electron device

Variable capacitor single-electron transistor including a P-N junction gate electrode

A method of manufacturing a single-electron transistor device is provided. The method includes forming a thinned region in a silicon substrate, the thinned region offset by a non-selected region. The method also includes forming at least one quantum island from the thinned region by subjecting the thinned region to an annealing process. The non-selected region is aligned with the quantum island and tunnel junctions are formed between the quantum island and the non-selected region. The present invention also includes a single-electron device, and a method of manufacturing an integrated circuit that includes a single-electron device.

Method to manufacture silicon quantum islands and single-electron devices

In one embodiment, a semiconductor structure used in manufacturing a semiconductor device includes a substrate layer. The structure also includes first and second isolation regions formed by etching an oxide layer provided on the substrate layer to define an epitaxial growth surface of the substrate layer for epitaxial growth of a substrate material on the epitaxial growth surface between the first and second isolation regions. The structure also includes an active region that includes the epitaxially-grown substrate material between the first and second isolation regions, the active region formed by epitaxially growing the substrate material on the epitaxial growth surface of the substrate layer.

Forming a semiconductor structure in manufacturing a semiconductor device using one or more epitaxial growth processes

The present invention provides source/drain electrodefor a transistor. The source/drain electrodecomprises a plurality of polysilicon grainslocated over a source/drain region. A metal salicide layerconformally coats the plurality of polysilicon grains. The present invention also includes a method of fabricating the above described source/drain electrode, and integrated circuithave includes a semiconductor devicehaving the described source/drain electrodes

Method to improve drive current by increasing the effective area of an electrode

The present invention facilitates semiconductor fabrication by providing methods of fabrication that employ high-k dielectric layers. An n-type well region () is formed within a semiconductor body (). A threshold voltage adjustment implant is performed by implanting a p-type dopant into the n-type well region to form a counter doped region (). A high-k dielectric layer () is formed over the device (). A polysilicon layer () is formed on the high-k dielectric layer and doped n-type. The high-k dielectric layer () and the polysilicon layer () are patterned to form polysilicon gate structures. P-type source/drain regions () are formed within the n-type well region ().

N+ poly on high-k dielectric for semiconductor devices

Methods and apparatus are disclosed for selectively inducing stress in a semiconductor device, wherein a first region of a substrate is implanted so as to induce stress in a second region. An electrical device is formed at least partially in the second region, wherein the induced stress therein may improve one or more operational characteristics of the device, such as channel region carrier mobility.

Methods and apparatus for inducing stress in a semiconductor device

A method for multiplying the pitch of a semiconductor device is disclosed. The method includes forming a patterned mask layer on a first layer, where the patterned mask layer has a first line width. The first layer can then be etched to form a first plurality of sloped sidewalls. After removing a portion of the patterned mask so that the patterned mask layer has a second line width less than the first line width, the first layer can be etched again to form a second plurality of sloped sidewalls. The patterned mask layer can then be removed. The first layer can be etched again to form a third plurality of sloped sidewalls. The first plurality of sloped sidewalls, the second plurality of sloped sidewalls, and the third plurality of sloped sidewalls can form an array of parallel triangular channels.

Pitch multiplication process

Variable capacitor single-electron device

The present invention provides a method of manufacturing a single-electron transistor device (). The method includes forming a thinned region () in a silicon substrate (), the thinned region () offset by a non-selected region (). The method also includes forming at least one quantum island () from the thinned region () by subjecting the thinned region () to an annealing process. The non-selected region () is aligned with the quantum island () and tunnel junctions () are formed between the quantum island () and the non-selected region (). The present invention also includes a single-electron device (), and a method of manufacturing an integrated circuit () that includes a single-electron device ().

The present invention provides a single-electron transistor device (). The device () comprises a source () and drain () located over a substrate () and a quantum island () situated between the source and drain (), to form tunnel junctions () between the source and drain (). The device () further includes a movable electrode () located adjacent the quantum island () and a displaceable dielectric () located between the moveable electrode () and the quantum island (). The present invention also includes a method of fabricating a single-electron device (), and a transistor circuit () that include a single-electron device ().

Suspended gate single-electron device

The present invention includes a method of forming a semiconductor device.

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Cambridge, MA, United States of America

Christoph A Wasshuber