Hseb Dresden Gmbh

Unity Semiconductor Corporation

Christine Schmidt

Bernd Srocka

Ralf Langhans

A method for optically measuring height profiles of surfaces, in which an image of the height profile is recorded using an optical recording system, is characterized in that the image is a differential interference contrast image and height gradients within the height profile are represented by intensity gradients, which are quantitatively or qualitatively evaluatable. The surfaces can have structures having a defined profile, in which intensity gradients in the differential interference contrast image, which assume, within a specified tolerance and within a specified range, a value which deviates from a predetermined value or assume a selected value from within a specified tolerance and within a specified range, indicate a defect.

Measurement method for height profiles of surfaces using a differential interference contrast image

An assembly for the generation of a differential interference contrast image (DIC) of an object in an imaging plane, comprising a radiation source; a K&#xf6;hler illuminating optical assembly for illuminating the object with light from the radiation source; an objective for imaging the object plane in an imaging plane, wherein the objective is provided with an exit pupil and an entrance pupil, and wherein the entrance pupil of the objective is positioned in the illuminating pupil of the K&#xf6;hler illuminating optical assembly; and a component for the generation of an interference is characterized in that the component for the generation of an interference is positioned in the exit pupil of the objective, and the component for the generation of an interference is formed by an amplitude filter with an amplitude transmission factor F(x,y), which complies with the equation: wherein F(x,y) is a functional expression for the description of the amplitude filter transmission and the phase of the amplitude filter depending on the coordinates x and y.

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Berlin, Germany

Christine Schmidt