Carl Zeiss Smt Gmbh

Asml Netherlands B.v.

Carl-zeiss-smt Ag

Christian Zengerling

Armin Schoeppach

Jens Kugler

Bernhard Gellrich

Ulrich Weber

Andreas Wurmbrand

Stephane Bruynooghe

A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.

Holding device for an optical element in an objective

Arrangements for mounting an optical element, such as a lens or a mirror, are disclosed.

Arrangement for mounting an optical element

In a device for preventing the creeping of an optical element, in particular a lens or a mirror, the optical element is connected to a mount via connecting members arranged on the circumference of the optical element. The position of the optical element in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element at least one holding element via which the optical element is held on a housing part of the objective (PL) is provided in addition to the connecting members.

Device for preventing the displacement of an optical element

Growing community of inventors

Muehlhausen, Germany

Christian Zengerling