Epcos Ag

Tdk Electronics Ag

Christian Wohlgemuth

Benjamin Bohl

Peter Thiele

Jan Ihle

Markus Eberstein

Bert Hundertmark

Bernd Polder

Peter Sättler

In an embodiment, a pressure sensor system includes a pressure sensor element with a flexible plate, wherein the pressure sensor element is a piezoresistive sensor element and a support element on which the pressure sensor element is arranged, wherein a flow channel configured to supply a medium to the flexible plate runs in the support element, wherein the flow channel has at least one sub-section, a longitudinal direction of which running perpendicularly below the flexible plate, and wherein a channel cross section of the at least one sub-section of the flow channel is at no point within the sub-section of the flow channel smaller than an area of the flexible plate.

Pressure sensor system having protection against freezing medium

In an embodiment a membrane includes a hydrophobic region having a plurality of hierarchically arranged micrometer-sized and submicrometer-sized units consisting of a membrane material, wherein a single micrometer-sized unit has a diameter of from 1 &#x3bc;m to 5 &#x3bc;m and a single submicrometer-sized unit has a diameter of &#x3c;1 &#x3bc;m, and wherein the membrane is configured to be used in a pressure sensor system.

Membrane with hierarchically arranged micrometer-sized and sub micrometer-sized units, pressure sensor system with improved measurement accuracy and method for producing such a pressure sensor system

A pressure transmitter is disclosed. In an embodiment a pressure transmitter includes a housing including a housing wall, a sensor element arranged inside the housing, a ceramic substrate acting as a carrier of the sensor element and of its electrical connection arranged inside the housing and a first heating element arranged inside the housing or the housing wall, wherein the pressure transmitter is configured to determine differential, relative or absolute pressure.

Media-separated pressure transmitter

A pressure sensor () is specified, comprising a housing (), a membrane (), which forms with the housing () a chamber () closed off toward the outside, and a filling opening () for filling the chamber () with a fluid medium (). The filling opening () is closed by means of a soldering or welding closure (). Furthermore, a method for producing a pressure sensor () is specified, wherein a housing (), which together with a membrane () forms a chamber (), is provided, the chamber () is filled with a fluid medium () through a filling opening (), and the filling opening () is subsequently closed by means of soldering or welding.

Pressure sensor and method for producing a pressure sensor

The invention relates to a pressure sensor () comprising a chamber () in which a sensor element () for measuring pressure is arranged. The pressure sensor () further comprises a compressible element () for overpressure protection, said compressible element () being arranged outside the chamber ().

Pressure sensor having a compressible element

The invention relates to a pressure sensor () comprising a housing () and a chamber () which is closed off from the exterior and filled with a fluid medium (). At least one compressible element () for overpressure protection is arranged inside the chamber ().

A pressure sensor has a substrate with conductor tracks for contact-connecting electrical components. The pressure sensor has a measuring element for converting a mechanical measurement variable into an electrical signal and a signal converter for processing the electrical signals from the measuring element further. Furthermore, the pressure sensor has a first diaphragm which, together with the substrate, forms a first closed cavity which contains an inert filling medium. At least one side of the measuring element of the pressure sensor, which comprises an active surface, has direct contact with the filling medium in the first cavity. The signal converter is arranged on the substrate in the form of an unhoused integrated circuit.

Growing community of inventors

Berlin, Germany

Christian Wohlgemuth