Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Christian Schirrmann

Harald Schenk

Thilo Sandner

Holger Conrad

Florenta Costache

Fabian Zimmer

Kirstin Bornhorst

Jan-Uwe Schmidt

A fluidic variable focal length optical lens has a sealed housing having a first fluidic chamber filled with a first fluidic medium and a second fluidic chamber filled with a second fluidic medium, the first and the second fluidic chamber being separated from each other by an elastic membrane, wherein the first and the second fluidic medium have different refractive indices, and a deformator configured to deform the membrane laterally within a pump zone, thereby laterally displacing the first fluidic medium from the pump zone to a lens zone and the second fluidic medium from the lens zone to the pump zone, so that the membrane also deforms in the lens zone and changes a focal length of the lens zone along a normal direction.

Fluidic variable focal length optical lens and method for manufacturing the same

The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.

Micromechanical device

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Dresden, Germany

Christian Schirrmann