Globalfoundries Inc.

Infineon Technologies Austria Ag

Christian Schippel

Alban Zaka

Ignasi Cortes Mayol

Alexandru Romanescu

Nicolas Sassiat

Stefan Flachowsky

Maciej Wiatr

Roman Boschke

El Mehdi Bazizi

Tom Herrmann

Remigiusz Viktor Boguszewicz

Andrei Sidelnicov

Dirk Priefert

Gerd Zschaetzsch

Gerd Zschätzsch

Felix Simon Winterer

A semiconductor device includes a substrate layer having a floating base region of a first conductivity type. A first well of a second conductivity type and the floating base region form a first pn junction. A first conductive structure is electrically connected to the first well. A barrier region of the second conductivity type and the floating base region form an auxiliary pn junction. A second conductive structure is electrically connected to the floating base region through a rectifying structure. A pull-down structure is configured to produce a voltage drop between the barrier region and the second conductive structure, when charge carriers cross the auxiliary pn junction.

Semiconductor device including substrate layer with floating base region and gate driver circuit

A method includes providing a semiconductor structure comprising a varactor region and a field effect transistor region. The varactor region includes a body region in a semiconductor material that is doped to have a first conductivity type. A gate-first process is performed by forming a gate stack over the semiconductor structure. The gate stack includes a layer of gate insulation material and a layer of work function adjustment metal positioned over the layer of gate insulation material. The gate stack is patterned to define a first gate structure over the varactor region and a second gate structure over the field effect transistor region. A source region and a drain region are formed in the field effect transistor region adjacent the second gate structure. The source region and the drain region are doped to have a second conductivity type opposite to the first conductivity type.

Semiconductor structure including a varactor and method for the formation thereof

The present disclosure relates to semiconductor structures and, more particularly, to fully depleted silicon on insulator (SOI) semiconductor structures and methods of manufacture. The structure includes: a gate structure formed over a semiconductor material; a source region adjacent to the gate structure; a drain region remote from the gate structure; and a drift region separating the gate structure from the drain region. The drift region includes an epitaxial material grown on the semiconductor material which increases the thickness of the semiconductor material in the drift region.

Fully depleted silicon on insulator (FDSOI) lateral double-diffused metal oxide semiconductor (LDMOS) for high frequency applications

A method of forming a semiconductor device includes forming a first well and a second well in a substrate, wherein the first well is doped with dopants of a first conductivity type and the second well is doped with dopants of a second conductivity type. A third well is formed within the first well, and a gate structure is formed above the substrate, the gate structure partially overlying at least the first and second wells. A first epi region is formed on the third well, wherein the first epi region is doped with second dopants of the second conductivity type, and a drain region is formed that is electrically coupled to the second well.

Method of forming a semiconductor device

The present disclosure provides a semiconductor device structure including an active region having a semiconductor-on-insulator (SOI) configuration, a semiconductor device of lateral double-diffused MOS (LDMOS) type, a dual ground plane region formed by two well regions which are counter-doped to each other, the dual ground plane region extending below the semiconductor device, and a deep well region extending below the dual ground plane region. Herein, the semiconductor device of LDMOS type comprises a gate structure formed on the active region, a source region and a drain region formed in the active region at opposing sides of the gate structure, and a channel region and a drift region, both of which being formed in the active region and defining a channel drift junction, wherein the channel drift junction is overlain by the gate structure.

Semiconductor device structure

The present disclosure provides a semiconductor device including a substrate, a first well and a second well formed in the substrate, the first well being doped with dopants of a first conductivity type and the second well being doped with dopants of a second conductivity type, a third well within the first well, a gate structure partially formed over the first and second wells, and a first epi region on the third well and a drain region electrically coupled to the second well, the first epi region being doped with dopants of the second conductivity type.

Semiconductor device and method

A semiconductor structure includes a varactor and a field effect transistor. The varactor includes a body region that includes a semiconductor material and a first gate structure over the body region. The body region is doped to have a first conductivity type. The first gate structure includes a first gate insulation layer and a first work function adjustment metal layer. The field effect transistor includes a source region, a channel region, a drain region and a second gate structure over the channel region. The source region and the drain region are doped to have a second conductivity type that is opposite to the first conductivity type. The second gate structure includes a second gate insulation layer and a second work function adjustment metal layer. The first work function adjustment metal layer and the second work function adjustment metal layer include substantially the same metal.

Semiconductor structure including a varactor

Integrated circuits having resistor structures formed from gate metal and methods for fabricating such integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate with a resistor area and a transistor area. The method deposits a gate metal over the resistor area and the transistor area of the semiconductor substrate, and the gate metal forms a gate metal layer in the resistor area. The method includes etching the gate metal to form a resistor structure from the gate metal layer in the resistor area. Further, the method includes forming contacts to the resistor structure in the resistor area.

Integrated circuits with resistor structures formed from gate metal and methods for fabricating same

E-fuses are used in integrated circuits in order to permit real-time dynamic reprogramming of the circuit after manufacturing. An e-fuse is hereby proposed wherein the metal element adapted to be blown upon passage of a current is not comprised of a silicide layer but is rather a metal layer above which a semiconductor layer is formed. A dielectric layer is then formed on the semiconductor layer, in order to prevent metal silicide from forming over the metal layer. The process of manufacturing the e-fuse can be easily integrated in an HKMG manufacturing flow. In particular, fully silicided metal gates may be manufactured in conjunction with the e-fuse, without jeopardizing the correct functioning of the e-fuse.

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Dresden, Germany

Christian Schippel