Polytec Gmbh

Christian Rembe

Alexander Drabenstedt

Matthias Schussler

Tobias Haist

Alexander Dräbenstedt

Sebastian Boedecker

Georg Siegmund

Thian-Hua Xu

Bernd Armbruster

Tian-Hua Xu

Volkmar Roth

Matthias Schüssler

Wanja Ochs

Michael Wortge

Tobias Braun

Christian Ehrmann

Robert Kowarsch

Michael Gartner

Mike Herberich

Andreas Leonhardt

Michael WÖRTGE

Moritz Giesen

A device for the interferometric measuring of an object, including a light source to generate an emitted beam, a beam splitting device for splitting the emitted beam into a measuring beam and at least first and second reference beams, an optic interference device, and first and second detectors, with the interference device and the first detector being embodied cooperating such that the measuring beam, at least partially reflected by the object, and the first reference beam are interfered on at least one detector area of the first detector. The interference device and the second detector are embodied cooperating such that the measuring beam, at least partially scattered by the object, and the second reference beam are interfered on at least one detector area of the second detector. A method is also provided for the interferometric measuring of an object.

Interferometric measuring device with detectors set at different angular ranges

A device for the interferometric measuring of an object, including a source to generate a source beam, a beam splitting device to split the source beam into a measuring beam and a reference beam, an optic interference device and a first detector, which cooperate such that the measuring beam reflected by the object at least partially is at least partially interfered as the receiver beam and the reference beam on a detector area of the first detector. The beam splitting device splits the source beam into a measuring beam, a first partial reference beam, and at least one second partial reference beam. There is at least one second detector embodied such that the first receiver beam is interfered with the first partial reference beam on a detection area of the first detector and the second partial receiver beam with a second partial reference beam on a detection area of the second detector, each with the formation of an optic interference. An assessment unit assesses the measuring signals of the detectors according to the principle of the reception diversity.

Device and method for an interferometric measuring of an object

A device for the optical non-contact vibration measurement of an vibrating object, including a laser Doppler vibrometer that has a laser as the light source for a laser beam, a first beam splitter assembly for splitting the laser beam into a measuring beam and a reference beam, a means for shifting the frequency of the reference beam or of the measuring beam in a defined manner, a second beam splitter assembly by which the measuring beam back-scattered by the oscillating object is merged with the reference beam and superimposed on the same, and a detector for receiving the superimposed measuring and reference beam and for generating a measurement signal. The laser is provided with a polarization filter arranged inside the optical resonator of the laser and the laser is frequency stabilized by regulating to a beat signal of the laser.

Method and device for the optical non-contact oscillation measurement of an oscillating object

A device for the interferometric measuring of an object, including a radiation source for generating an output beam, at least one beam splitter, as well as at least one detector, with the beam splitter being arranged in the radiation path of the output beam such that the output beam is split into at least one measuring beam and one reference beam, and the device is embodied to interfere the reference beam on the detector with an interference beam to form an optic interference. The device has an open optic resonator, which is arranged in the radiation path of the device such that the measuring beam enters the open optic resonator and the interference beam emitted from the open optic resonator is interfered with a reference beam on the detector to form an optic interference. The invention further relates to a method for the interferometric measuring of an object.

Device and method for the interferometric measuring of an object

An optical interferometer including an output-beam beam input for coupling-in an output beam, and a beam splitter device for splitting the output beam into at least one first sub-beam and one second sub-beam, the interferometer being embodied as a heterodyne interferometer by virtue of at least one optical frequency shifter being arranged in the beam path of the interferometer and the interferometer including one or more optical waveguide elements, by which optical waveguides are formed, at least between the output-beam beam input, beam splitter device and frequency shifter. The frequency shifter is arranged in the beam path of the first or second sub-beam.

Optical interferometer and vibrometer comprising such an optical interferometer

A device for interferometric vibration measurement, having a radiation source for generating an original beam, a first beam splitter for dividing it into measuring and reference beams, a detector and a focusing device. The measuring beam at least partly reflected by the object and the reference beam are superimposed on a detection area of the detector, and the focusing device in the beam path of the measuring beam between the image unit and object focuses it onto a measuring point. Here, a measuring beam having a wavelength greater than 1100 nm is generated and the device has an image unit for two-dimensional imaging of the object surrounding the measuring point. The measuring beam focus lies in the focal plane of the image unit and, by use of the focusing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously.

Device and method for interferometric vibration measurement of an object

A vibrometer and a method for optically measuring oscillations at an object, including a radiation source for creating a source beam, a beam splitter to split the source beam into a measuring beam and a reference beam, an optic interference device for interfering the reference beam with a measuring beam, at least partially reflected by the object, and a detector, with the interference device and the detector being embodied cooperating such that a measuring beam, at least partially deflected by the object, and the reference beam interfere on the detector. The vibrometer is embodied as a heterodyne vibrometer, having an optic frequency shift unit, which is arranged in the optical path of the vibrometer, to form a carrier frequency by creating a frequency difference between the measuring beam and the reference beam. The beam splitter and the frequency shift unit are embodied as an acousto-optic modulator in an optic construction element to deflect the source beam, with the acousto-optic modulator being embodied such that the source beam entering the acousto-optic modulator can be split into at least two diffraction beams: a first diffraction beam of diffraction order of 1 and a second diffraction beam of diffraction order of &#x2212;1, and the acousto-optic modulator is arranged in the optical path of the vibrometer such that one of the two diffraction beams represents the measurement beam and the other diffraction beam represents the reference beam.

Vibrometer and method for optically measuring an object

An interferometer for optically measuring an object (), including a light source (), at least one beam splitter () and at least one detector (), with the beam splitter being arranged in the beam path of the light source such that a light beam created by the light source is split into a working beam () and a reference beam (). The interferometer is embodied such that the working beam impinges on the object () to be measured and the working beam is at least partially reflected by the object and interfered with the reference beam on the detector (). Here it is essential that the interferometer is provided with a spatial light modulator, which comprises a hologram control unit () and a hologram reconstruction unit () connected thereto, with the hologram reconstruction unit being arranged in the beam path of the working beam between the beam splitter () and the object () and the hologram control unit () controlling the hologram reconstruction unit () such that the hologram reconstruction unit creates an optionally predetermined hologram such that the working beam is deflected and/or split by the hologram reconstruction unit.

Interferometer for optically measuring an object

A device for the optic measuring of an object (), including a signal processing unit () as well as an interferometer with a light source () and with at least one detector (). The interferometer is embodied such that a light beam () created by the light source () is split at least into a working beam () and a reference beam (), with the working beam () impinging the object () and the working beam () is at least partially reflected by the object and interfered with the reference beam () on the detector (). The signal processing unit () is connected to the detector () and includes a vibrometer processing unit (), which detects the motion of the object () from the measuring signals of the detector (). It is essential that the light source () creates light with a coherence length shorter than 1 cm and that the interferometer comprises a device for changing the optic path length (), and the signal processing unit comprises a focus control () controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.

Heterodyne interferometer device for optically measuring an object

A measuring device for the optic measuring of an objectis provided, in particular for measuring a motion of the object. The device includes an interferometerwith a measuring beam exit, a reflection beam entry, an interfering beam exit, and a light sourcefor creating a light beam, an optic detector, which is arranged at the interfering beam exitof the interferometersuch that a light beam exiting the interfering beam exitimpinges the detector and a signal processing unitconnected to the detectorbeing embodied such that they can measure measuring signals of the detector. The interferometer () is provided with a switched beam entry () and is embodied such that dependent on a switching signal connected to a switched beam entry () a light beam exits the measuring beam exit () essentially with a predetermined light intensity and at a predetermined angle, and that the signal processing unit () is provided with a switched beam exit, which is connected to the switched beam entry () of the interferometer, with the signal processing unit () controlling the interferometer such that a light beam exits the measuring beam exit () only during the measuring of measuring signals essentially with a predetermined light intensity and at a predetermined angle.

Measuring device and method to optically measure an object

A scanning microscope for the optical measuring of an object in which a measurement beam emitted by the light source impinges the object and is reflected by the object as a reflection beam that reenters through the lens into the radiation path of the microscope. A scanner control unit controls a displacement to change the relative position of the object and the measuring beam so that the beam is directed to at least two different measuring points on the object. An excitation unit periodically excites the object. The reflection beam is visualized on a signal detector, and a signal storage unit saves a measuring sequence of signals of the signal detector. The scanner control unit cooperates with the excitation and signal storage units to control them such that for each measuring point on the object at least one measuring sequence of measuring signals of the signal detector is saved.

Scanning microscope for optically measuring an object

An apparatus for optical measurement of an object, especially for measuring movement, is provided, which includes an interferometer for measuring movements along the measurement beam of the interferometer, as well as a confocal auto-focus microscope. The interferometer is coupled in the beam path of the confocal auto-focus microscope, such that the measurement beam of the interferometer is simultaneously the focusing beam of the microscope. Here, it is guaranteed that the interferometric movement measurement is always performed at the focal point of the microscope that is used. This enables automatic correction of the Guoy effect for objectives with high numerical aperture. In addition, for the use of a scanning confocal auto-focus microscope, data sets of test objects can also be measured, which comprise their vibrational behavior, height profile, and optionally also their in-plane movement behavior.

Apparatus for optical measurement of an object

An optical assembly to be mounted on a microscope for measuring micro-structures is provided, which images a first object image () onto a second object image () lying above the optical assembly and in this way shifts the object image at a standardized interface for a camera (), as well as the interface for the camera itself, upwards. The optical assembly permits a stroboscope lamp () to be coupled into the incident beam path of the microscope over a beam splitter () without requiring any structural modifications to the microscope. Instead, the optical assembly according to the invention is simply mounted on the C-mount of the microscope. The invention enables the use of stroboscope lamps in commercially available microscopes, which otherwise are not suitable for stroboscopic examinations.

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Waldbronn, Germany

Christian Rembe