Abcd Technology Sarl

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Christian Petit

Giacomo Benvenuti

Estelle Halary Wagner

Olivier Sublemontier

Youri Rousseau

Alain Billard

Jean-Paul Gaston

Frédéric Perry

Christophe Muller

Pascal Briois

A device () for coating a substrate () with nanometric sized particles, wherein the device comprises: a plurality of aerodynamic lenses able to product a jet () of nanometric sized particles, each of the aerodynamic lenses having a longitudinal axis, the aerodynamic lenses being arranged so that the various longitudinal axes are parallel and oriented in a first direction (X) defining the direction of propagation of the jet and in the form of at least two columns () offset from each other in a second direction (Y) orthogonal to the first direction, where the first and the second column each comprise at least one of the aerodynamic lenses, the at least one of the aerodynamic lenses of the first column also being offset relative to the at least one of the aerodynamic lenses of the second column in a third direction (Z) that is both orthogonal to the first direction and to the second direction.

Device for depositing nanometric sized particles onto a substrate

A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each of the quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contains different species. A process for vacuum deposition of one or more species onto a substrate, including providing a substrate for thin film growth in a growth chamber, providing two or more species to be effused towards the substrate, effusing the two or more species towards the substrate with line of sight propagation and in high vacuum conditions, and obtaining a thin film with gradients of chemical elements composition, morphology or crystalline phase.

Vapor phase deposition system

A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contain different species.

Growing community of inventors

Valdahon, France

Christian Petit