Applied Materials, Inc.

Sera Solar Corporation

Other

Christian M Gronet

James F Gibbons

Satheesh Kuppurao

Gary Eugene Miner

Peter A Knoot

Guangcai Xing

David R Lopes

Israel Beinglass

Mahalingam Venkatesan

George W Cogan

Nathan S Lewis

Gary E Miner

A rapid thermal heating apparatus including a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources and reflectors direct radiation through a window of an envacuable chamber to radiate regions of a substrate in the chamber with a pattern of radiation intensity.

Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature

A method of forming an oxide on a substrate. According to the method of the present invention a substrate is placed in a chamber. An oxygen containing gas and a hydrogen containing gas are then fed into the chamber. The oxygen containing gas and the hydrogen containing gas are then caused to react with one another to form water vapor in the chamber. The water vapor then oxidizes the substrate.

Method and apparatus for insitu vapor generation

A barrier to prevent reactant gases from reaching the surfaces of a susceptor support for a substrate upon which polysilicon films are to be deposited provides improved uniformity of the depositing film across the substrate, and prevents substrate-to-substrate variations during sequential depositions. A suitable barrier includes a preheat ring extension that mates with an extension of the susceptor support.

Depositing polysilicon films having improved uniformity and apparatus therefor

Method for insitu vapor generation for forming an oxide on a substrate

A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.

Rapid thermal heating apparatus and method

A rapid thermal heating apparatus including an infrared camera located outside an evacuable chamber to sense infrared radiation emitted from different regions of a substrate.

Rapid thermal heating apparatus and method including an infrared camera

A rapid thermal heating apparatus including a substrate support and a bearing assembly in a processing chamber. The substrate support is mounted on the bearing assembly so that it may be rotated. A rotatable drive ring is located external to the processing chamber. The drive ring provides a force to couple the bearing assembly to the drive ring without the use of a vacuum seal so that rotation of the drive ring causes the substrate support to rotate.

Rapid thermal heating apparatus including a substrate support and an

Rapid thermal heating apparatus including a plurality of light pipes and

A rapid thermal heating apparatus including an evacuable chamber having a window, a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources are disposed outside of the chamber and positioned adjacent to the window. They have a central longitudinal axis that extends in a substantially perpendicular direction relative to the window. The reflectors direct radiant energy through the window to radiate predetermined regions of a backside surface of a substrate in the chamber. The reflectors extend along a major portion of the longitudinal axis of the radiant energy sources. The substrate sits on a support in the chamber, and a source of processing gas, including a gas inlet manifold, is provided for passing processing gas to a frontside surface of the substrate.

Rapid thermal heating apparatus including a plurality of radiant energy

Rapid thermal heating apparatus and control therefor

A rapid thermal heating apparatus including an evacuable chamber, a plurality of radiant energy sources, reflectors associated with the radiant energy sources, and a cooling passageway adapted to include a coolant to cool the reflectors.

Growing community of inventors

Palo Alto, CA, United States of America

Christian M Gronet