Robert Boschgmbh

Paragon Ag

Paragon

Christian Krummel

Heribert Weber

Michael Arndt

Christoph Schelling

Frank Fischer

Hubert Benzel

Hans Artmann

Frank Schaefer

Thorsten Pannek

Michael Bauer

Michael Saettler

Doris Schielein

A device for detecting radiation signals and a device for measuring the concentration of a substance are described, a first detector and a second detector being provided on a first chip, and a first filter and a second filter being provided on a second chip, the first chip and the second chip being connected to one another in hermetically sealed fashion.

Device for detecting and device for measuring the concentration of a substance

A chemical sensor has a substrate, a first metallization plane on the substrate, an electrode structure formed in the first metallization plane, a passivation layer applied to the first metallization plane and formed with contact holes, a sensitive ceramic layer on the passivation layer and in the contact holes, and a bond-promoting layer configured as a second metallization plane and between the passivation layer and the ceramic layer.

Microstructured chemical sensor

A thermal sensor is provided, which is distinguished in that it includes means for removing a deposit on a sensing element of the sensor. In addition, means for detecting the deposit may be provided. The means for removing the deposit are realized by a trigger circuit for the sensing element, which brings about heating of the sensing element. In addition, a reference sensing element may be utilized as well, which is used both for indirect heating and for checking the sensing element. Due to the use of a catalytic layer on the sensing element, a deposit may be removed at relatively low temperatures.

Thermal sensor

A micromechanical component includes a substrate and a cover layer deposited on the substrate, underneath the cover layer, a region of porous material being provided which mechanically supports and thermally insulates the cover layer. On the cover layer, a heating device is provided to heat the cover layer above the region; and above the region, a detector is provided to measure an electric property of a heated medium provided above the region on the cover layer.

Micromechanical component

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Kirchentellinsfurt, Germany

Christian Krummel