Ctf Solar Gmbh

Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

China Thumph International Engineering Co., Ltd.

China Triumph International Engineering Co., Ltd.

Smit Thermal Solutions B.v.

China Triumpf International Engineering Co. Ltd.

Christian Kraft

Bastian Siepchen

Christoph Metzner

Shou Peng

Olaf Zywitzki

Henry Morgner

Michael Harr

Krishnakumar Velappan

Xinjian Yin

Christian Drost

Torsten Werner

Bettina Späth

Ganhua Fu

Daniel Hirsch

Ludwig Decker

Stefan Rau

Gerard Kaper

Wiro Zijlmans

The present invention relates to a method and an apparatus for determining the position of a substrate within a closed chamber, wherein the substrate is moved within the chamber by a transport system comprising at least one rotating shaft. A load-converting element is provided adjacent to at least one of the rotating shafts, wherein the load-converting element detects a load acting on the at least one rotating shaft and converts it into an electrical parameter. While no substrate is present on the at least one rotating shaft, a first output signal corresponding to a first value of the electrical parameter is measured. The output signal is then monitored and a presence of the substrate on the at least one rotating shaft is detected when the output signal differs from the first output signal by at least a predetermined amount.

Method for determining a substrate position in a closed chamber and apparatus for performing the method

A method for depositing a CdTe layer on a substrate in a vacuum chamber by means of physical gas phase deposition is provided. The substrate is heated to a coating temperature before the deposition process and then guided past a vessel in which CdTe is converted into a vapour state, a gaseous component with an increased pressure (compared to the vacuum in the vacuum chamber) flowing through at least one inlet, against the substrate surface to be coated, such that the gaseous component is adsorbed on the substrate surface to be coated before the substrate is guided past the at least one vessel.

Method for depositing a CdTe layer on a substrate

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Dresden, Germany

Christian Kraft