Karlsruher Institut Fur Technologie

Northrop Grumman Litef Gmbh

Vanguard Photonics Gmbh

Christian Koos

Wolfgang Freude

Matthias Blaicher

Philipp-Immanuel Dietrich

Juerg Leuthold

Nicole Lindenmann

Matthias Lauermann

Ingo Reuter

Tobias Hoose

Yilin Xu

Sebastian Köber

Maria Laura Gödecke

Philipp Dietrich

Timo Mappes

Sven Voigt

Sandeep Ummethala

Hendrik Hölscher

Tobias Wienhold

Uwe Bog

Georg Dorner

Matthias Worgull

Mareike Trappen

Sentayehu Wondimu

Gerald Goering

Norbert Schneider

Jan Michael Brosi

Jurg Leuthold

Thomas Zwick

Simon Schneider

Claudius Weimann

Alban Sherifaj

Thomas Henauer

Jürg Leuthold

Jan-Michael Brosi

The present invention relates to a micro-optomechanical system () and to a method for the production thereof. The micro-optomechanical system () comprises The micro-optomechanical systems () provided have virtually any desired shaping in conjunction with very high resolution and are therefore suitable for a wide range of applications.

Micro-optomechanical system and method for the production thereof

The invention relates to an apparatus () and a method for optically characterizing or processing an object (), and to an object transport unit (). The apparatus () comprises The apparatus (), the method and the object transport unit () facilitate the optical characterization or processing of an object () in a manner that meets the specific needs of high-throughput industrial applications.

Apparatus and method for optically processing an object

The invention relates to a method and to an assembly () for localizing an optical coupling point () and to a method for producing a microstructure () at the optical coupling point (). The method for localizing an optical coupling point () comprises the following steps: a) providing an optical component (), which comprises an optical coupling point (), the optical coupling point having an interaction region () lying outside of a volume encompassed by the optical component (); b) producing optical radiation in a production region (), the production region () overlapping at least partly with the interaction region () of the optical coupling point (), light being applied to a medium () located in the production region (), which light is modified by the medium () in such a way that the optical radiation is thereby produced; c) sensing at least part of the produced optical radiation in a sensing region (), the sensing region () overlapping at least partly with the interaction region () of the optical coupling point (), and determining a spatially resolved distribution of the sensed part of the produced optical radiation; and d) determining the localization of the optical coupling point () from the determined spatially resolved distribution of the sensed part of the produced optical radiation, the optical radiation being produced or at least the part of the produced optical radiation being sensed through the optical coupling point (). The optical coupling point () can thereby be precisely localized with a relative positioning tolerance of better than 1 μm. Thus, low coupling losses of an optical connection to the optical component () can be achieved and microstructures () can be precisely placed at the optical coupling point ().

Localization of optical coupling points

An optical system and a method for producing it is disclosed. The optical system has at least two separate optical components and an optical connection between them. In the inventive method, first and second optical component are provided, each having respective beam profiles. An arrangement of the first and second optical components and the form and target position of at least one beam-shaping element are specified. The beam-shaping element is produced using a three-dimensional direct-writing lithography method in situ at the target position to thereby obtain an optical component supplemented by the beam-shaping element. The supplemented optical component is placed and fixed on common base plate to thereby obtain the optical system. The optical systems produced with the present method can be used in optical data transfer, measurement technology and sensors, life sciences and medical technology, or optical signal processing.

Method for producing an optical system and optical system

Disclosed is a method for lithographically producing a target structure on a non-planar initial structure by exposing a photoresist by means of a lithography beam. In the inventive method, the topography of a surface of the non-planar initial structure is detected. A test parameter for the lithography beam is used and an interaction of the lithography beam with the initial structure and the resultant change in the lithography beam and/or the target structure to be produced are determined. A correction parameter for the lithography beam is determined such that the change in the lithography beam and/or the target structure to be produced that is caused by the interaction of the lithography beam with the initial structure is reduced. The desired target structure on the initial structure is produced by exposing the photoresist by means of the lithography beam using the correction parameter.

Method and device for lithographically producing a target structure on a non-planar initial structure

The present invention relates to a method for producing a molded body (), comprising the following steps:

Method for producing a molded body

A waveguide component includes a waveguide, which is at least partially transparent or translucent with respect to light and is set up in such a way that light can be conducted at least partially through the waveguide. The waveguide includes a waveguide core, a first casing region, and a second casing region. The waveguide core is formed from one or more spatially separated elements of at least one waveguide core material. The first casing region, which includes at least one electro-optical material, interacts with light guided in the waveguide. The first casing region is disposed around the one or more elements of the waveguide core. The second casing region includes at least one dielectric material. The second casing region is arranged around the first casing region and/or the waveguide core. The waveguide component further includes at least two line regions that are at least partially electrically conductive.

Waveguide component

The present invention provides a process for producing an optical waveguide () more particularly for integrated photonic systems. This process comprises provision of polymerizable material; local polymerization of the polymerizable material to produce a multiplicity of polymerized structural elements (); removal of the unpolymerized regions of the polymerizable material; and heating of the polymerized material more particularly above the glass transition temperature thereof in order to fuse the multiplicity of polymerized structural elements () together to form the optical waveguide ().

Production of 3D free-form waveguide structures

The invention relates to a method and a corresponding apparatus for measuring distance and optionally speed, in particular for multiscale distance measurement. The method comprises generating a first and a second frequency comb signal (), wherein the first and second frequency comb signals () have different line spacings; a reference measurement comprising superimposing the at least one part of the first frequency comb signal () and at least one part of the second frequency comb signal () in a reference beam path () and detecting the superimposition signal propagated by the reference beam path; a first measurement comprising superimposing at least one part of the second frequency comb signal () on the at least one part of the first frequency comb signal (), injecting the superimposition signal into a measurement beam path () and detecting the superimposition signal propagated by the measurement beam path; and determining the path difference between the reference beam path () and the measurement beam path () from the detected superimposition signals.

Multiscale distance measurement with frequency combs

The present invention relates to a microresonator, in particular a full polymer microresonator, a method for producing the microresonator, and the use of the microresonator as a microlaser and/or molecular sensor.

Full polymer microresonators

In an integrated optical circuit, light from a light source is polarized and coupled to a first and second strip waveguide. A waveguide coupling element couples the two optical signals from the two strip waveguides to different polarization modes of an optical fiber line. The optical fiber line is connected to a measuring head, which reflects the optical signal and in which a phase difference between the two optical partial signals is modulated in a magnetic field. In the waveguide coupling element, the reflected signal is split into two optical partial signals having the same polarization and the phase difference between the two partial signals is determined. A phase modulator device provides for closed-loop operation. Compared to fiber-optical concepts, the number of splices is reduced.

Integrated optical circuit and method for measuring current as well as sensor module and measuring device

The invention lies in the field of optical metrology and related to optical coherence tomography (OCT). In particular, the invention relates to an apparatus and a method for the depth-dependent adaptation of the dynamic range of an OCT system to the profile of the backscattered power to be measured. The dynamic range of the measuring method can therefore be decoupled from the dynamic range of the analog/digital converter used. The invention is used, in particular, in the characterization of strongly scattering or strongly absorbing biological or technical samples.

Optical coherence tomography with an extended dynamic range

A method for making optical connections with optical waveguides includes mounting the optical waveguides or a device comprising the optical waveguides, on a component carrier. A partial region of the optical waveguides is embedded in a volume of resist material. Positions of the optical waveguides to be connected are detected with reference to a coordinate system using a measuring system. Favorable, three-dimensional geometries are determined for optical waveguide structures for connecting the optical waveguides to each other at predetermined connecting locations and the optical waveguide structure geometries are converted to a machine-readable dataset. The optical waveguide geometries in the volume of the resist material are three-dimensionally structured using a direct-writing lithography device operating on the basis of the machine-readable dataset. The structured resist material is treated using physical or chemical methods to form at least one optical waveguide structure having ends connected to predetermined connecting locations of the optical waveguides.

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Siegelsbach, Germany

Christian Koos