Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Sony Corporation

Jenoptik Ldt Gmbh

Technische Univeristaet Chemnitz

Cms Mikrosystene Gmbh Chemnitz

Christian Kaufmann

Thomas Gessner

Wolfram Doetzel

Ramon Hahn

Steffen Kurth

Koichi Ikeda

Akira Akiba

Andreas Bertz

Jan Mehner

Karla Hiller

Joerg Froemel

Manfred Rauch

Joachim Markert

Markus Nowack

Heinz-Ulrich Lowe

Wolfram Dotzel

Dirk Tenholte

Steffen Kurt

Stefan Leidich

Udo Wollmann

Jörg Frömel

An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line.

Electrostatically actuated micro-mechanical switching device

The invention relates to a sensor element for pressure measurement, having a substrate () and at least one mass element (), which is arranged spaced apart from the substrate () and is connected in an oscillating manner to the substrate () and/or a support body () fixed relative to the substrate (), so that a gap is formed between the mass element () and the substrate (), the width of which can be varied through oscillations of the mass element (). At least one recess and/or at least one bushing () is located in the surface of the substrate () delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10mbar.

MEMS vacuum sensor based on the friction principle

A resonance scanner, wherein a frame (), a drive plate (), a mirror () and torsion springs () form an actuator part (), said drive plate () being attached within the frame () by two first torsion springs () such that the drive plate () can oscillate about a common first axis of torsion () of both torsion springs (), said mirror () being attached within the drive plate () by two second torsion springs () such that the mirror () can oscillate about a common second axis of torsion () of both torsion springs (), and said first axis of torsion () and said second axis of torsion () being parallel to each other; wherein, further, only the frame () of the actuator part () is attached to side walls () of a box-shaped stator part (), a drive means (stator electrodesor coil) is arranged at a bottom () of the stator part () only in the region of the geometrical surface area of the drive plate () and said bottom () has a recess () in the region of the geometrical surface area of the mirror (), which recess () is dimensioned at least such that a maximum mechanical deflection of the mirror () is not limited by the bottom (), said drive means (stator electrodesor coil) applying a force only directly to the drive plate () and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (), which differs from the eigenfrequency of the drive plate ().

Resonance scanner

Micro swivel actuators and a procedure for the production of the same

Growing community of inventors

Burgstaedt, Germany

Christian Kaufmann