Globalfoundries Inc.

Christian J Ayala

Cung D Tran

Ravi Prakash Srivastava

Rui Chen

Xintuo Dai

Sanggil Bae

Dongyue Yang

Minghao Tang

Md Motasim Bellah

Pavan Kumar Chinthamanipeta Sripadarao

Bradley Morgenfeld

Huaxiang Li

Kripa Nidhan Chauhan

In an exemplary method, a first layer is formed on a substrate. First overlay marks are formed in a first zone of the first layer. A non-transparent layer is formed on top of the first layer. At least a portion of the non-transparent layer is removed from an area above the first zone of the first layer. This provides optical access to the first overlay marks. A second layer is formed on top of the non-transparent layer. Second overlay marks are formed in a second zone of the second layer. Position information is obtained from each of the first overlay marks and the second overlay marks.

Structure and method to improve overlay performance in semiconductor devices

Growing community of inventors

Schenectady, NY, United States of America

Christian J Ayala