Robert Boschgmbh

Christian Hoeppner

Mirko Hattass

Benjamin Schmidt

Robert Maul

Burkhard Kuhlmann

Reinhard Neul

Rolf Scheben

Torsten Ohms

Thorsten Balslink

Friedjof Heuck

Odd-Axel Pruetz

Andreas Lassl

Lars Tebje

Joerg Braeuer

A method for manufacturing a MEMS element, including the following: forming a least one stationary weight element and at least one moving weight element in the MEMS element, and positioning at least one fixing element at the stationary weight element and at the moving weight element, the fixing element being formed so as to be able to be severed.

Method for manufacturing a MEMS element

A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.

Micromechanical yaw rate sensor and method for operating same

A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.

Micromechanical yaw rate sensor and method for the production thereof

A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.

Rotational speed sensor with minimized interference movements in the driving mode

A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.

Dual-axis ultra-robust rotation rate sensor for automotive applications

A rotation rate sensor includes a first rotationally suspended mass that exhibits a first axis of rotation. The first mass includes a first rotation-rate-measuring element that captures a first rate of rotation about the first axis of rotation and that outputs the first rate of rotation in a first signal. The sensor further includes a second rotationally suspended mass that exhibits a second axis of rotation and is arranged parallel to the first axis of rotation. The second mass includes a second rotation-rate-measuring element that captures a second rate of rotation about the second axis of rotation and that outputs the second rate of rotation in a second signal. The sensor further includes a propulsion device that propels the first and second mass and an evaluating device that outputs a difference of the signals as a third rate of rotation to be measured.

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Stuttgart, Germany

Christian Hoeppner