Infineon Technologies Ag

Christian Eckl

Albert Birner

Helmut Brech

Matthias Zigldrum

Michaela Braun

In an embodiment, a semiconductor device includes a semiconductor substrate having a bulk resistivity &#x3c1;&#x2265;100 Ohm.cm, a front surface and a rear surface. An LDMOS transistor is arranged in the semiconductor substrate. A RESURF structure including a doped buried layer is arranged in the semiconductor substrate. The LDMOS transistor includes a body contact region doped with a first conductivity type, and a source region disposed in the body contact region and doped with a second conductivity type opposite the first conductivity type. The source region includes a first well and a second well of the same second conductivity type. The first well is more highly doped than the second well. The first well extends from inside the body contact region to outside of a lateral extent of the body contact region in a direction towards a source side of a gate of the LDMOS transistor.

Semiconductor device including an LDMOS transistor and a resurf structure

In an embodiment, a high frequency amplifying circuit includes a semiconductor device. The semiconductor device includes a semiconductor substrate having a bulk resistivity &#x3c1;&#x2265;100 Ohm&#xb7;cm, a front surface and a rear surface, an LDMOS (Lateral Diffused Metal Oxide Semiconductor) transistor in the semiconductor substrate, and a RESURF structure comprising a doped buried layer arranged in the semiconductor substrate, spaced at a distance from the front surface and the rear surface, and coupled with at least one of a channel region and a body contact region of the LDMOS transistor.

Semiconductor device including an LDMOS transistor and a RESURF structure

In an embodiment, a semiconductor device includes a semiconductor substrate having a bulk resistivity &#x3c1;&#x2265;100 Ohm.cm, a front surface and a rear surface, at least one LDMOS transistor in the semiconductor substrate, and a RESURF structure. The RESURF structure includes a doped buried layer arranged in the semiconductor substrate, spaced at a distance from the front surface and the rear surface, and coupled with at least one of a channel region and a body contact region of the LDMOS transistor.

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Wuppertal, Germany

Christian Eckl