Robert Boschgmbh

Christian Doering

Burkhard Kuhlmann

Reinhard Neul

Jochen Franz

Joerg Hauer

Wolfram Bauer

Rainer Willig

Udo Bischof

Udo-Martin Gomez

Markus Lutz

Karsten Funk

Michael Fehrenbach

Janpeter Wolff

Johannes Classen

Christoph Lang

Jens Frey

Christoph Kern

Armin Schuelke

Holger Scholzen

Michael Kleindl

Steffen Schott

Michael Mettner

Sven Zinober

Christoph Schelling

Joerg Muchow

Hans Artmann

Thomas Friedrich

Michael Huebel

Jiri Marek

Gottfried Flik

Fabian Henrici

Andreas Thomae

Gerhard Wucher

Siegbert Goetz

Pavlo Saltikov

Reiko Zach

Dieter Maurer

Remigius Has

Hans-Peter Trah

Bernhard Opitz

Juergen Stein

Markus Ledermann

Michael Mueller

Fevzi Yildirim

Juergen Graf

Martin Willmann

Timo Lindemann

Ewgenij Landes

Thomas Schittny

Wolfgang Koetzle

Johannes Kenntner

Franziska Rohlfing

Viacheslav Bekker

Marc Brueck

Thomas Grauer

Juergen Krueger

Udo Gomez

Martin Ammann

Anke Maier-Schleich

Michael Schuettoff

Remigius Niekrawietz

Ewgenji Landes

Petra Siegenthaler

Stefan Leopold

Anke Maierschleich

Burhard Kuhlmann

A micromechanical sensor device and a corresponding production method, in which the micromechanical sensor device is equipped with a sensor substrate having a front side and a rear side, a sensor region provided on the front side that can be brought into contact with an environmental medium, and a capping device, attached on the front side, for capping the sensor region. In the capping device and/or in the sensor substrate, one or more capillaries are formed for conducting the environmental medium onto the sensor region, a liquid-repellent layer being provided at least in some regions on the inner walls of the capillaries.

Micromechanical sensor device with improved liquid tightness protection

A sensor for detecting particles, in particular soot particles, includes at least two measuring electrodes and a heating element. The measuring electrodes are placed on a chip of an electrically insulating material, or on an electrically insulating intermediate layer that is on the chip. The sensor also includes a ceramic substrate upon which the heating element is configured. The chip is connected to the ceramic substrate and is made of a highly thermally conductive material.

Sensor for detecting particles

A pressure-measuring device for recording a pressure in a combustion chamber of an internal combustion engine, having a force transmission body, situated in a housing, which is exposed to the combustion chamber and which transmits the combustion chamber pressure to a pressure-measuring unit at least indirectly by an axial motion, and having a flexible diaphragm, which is situated between the force transmission body and the housing. The flexible diaphragm is configured to be resilient to implement the axial motion of the force transmission body within the housing. A flexible additional diaphragm is connected ahead of the flexible diaphragm on the combustion chamber side, which seals the flexible diaphragm from the combustion chamber.

Pressure-measuring device with additional diaphragm

A combustion chamber pressure sensor is provided for recording a pressure in a combustion chamber of an internal combustion engine, the combustion chamber pressure sensor has a housing having an inner space that is at least partially enclosed by the housing. At least one mechanical-electrical transducer element, for recording the pressure, is accommodated in the housing. The housing has at least one housing opening. The housing opening is sealed by at least one diaphragm. The diaphragm has at least one convex curvature towards the inner space.

Combustion chamber pressure sensor for recording a pressure in a combustion chamber of an internal combustion engine

A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.

Micromechanical sensor element for capacitive differential pressure detection

A device for detecting a combustion chamber pressure of an internal combustion engine, in particular a gasoline engine. The device includes a sensor housing, the sensor housing being set up to be at least partially introduced into a combustion chamber of the internal combustion engine. At least one mechanical-electrical transducer element is accommodated inside the sensor housing, which is separated from the sensor housing by at least one sensor holder, in particular a sensor holder which at least partially encloses the mechanical-electrical transducer element. The sensor holder has an at least partially rigid design.

Device for detecting a combustion chamber pressure of an internal combustion engine

A glow plug for a combustion chamber of a self-igniting internal combustion engine has a ceramic heating element designed as a sheathed-element glow plug, which is surrounded by a supporting tube. The ceramic heating element is sealed with respect to the combustion chamber of the internal combustion engine by a seal in the supporting tube. The seal is designed as a sealing element made of an FeNi alloy having an Invar effect.

Seal for a glow plug

A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm. The first diaphragm is able to be pressurized by a first measuring pressure emanating from the front side of the sensor element, and the second diaphragm is able to be pressurized by a second measuring pressure emanating from the rear side of the sensor element. The fixed counter-electrode is located in the sealed volume between the two diaphragms of the diaphragm structure.

Sensor element for capacitive differential-pressure sensing

A pressure-measuring device is situated in a chamber of an internal combustion engine. The pressure-measuring device has a housing, a force-transmitting element that protrudes partly from the housing at a chamber-side opening of the housing, and a pressure sensor that is situated in an interior space of the housing. The pressure sensor stands in effective connection to the force-transmitting element. In addition, a diaphragm is provided that seals the interior space of the housing, in which the pressure sensor is situated, against the chamber-side opening. The diaphragm, which is preferably fashioned as a metal diaphragm, has a force-transmitting segment that is oriented in an axial direction of the force-transmitting element. Moreover, the pressure sensor stands in effective connection with the force-transmitting element via the force-transmitting segment of the diaphragm. In this way, there takes place at least a partial compensation of thermally caused changes in length of the diaphragm, caused for example by hot combustion gases, and resulting in periodic impairments of the pressure measurement made by the pressure sensor.

Pressure-measuring device

A sensor system for measuring the pressure in the combustion chamber of an internal combustion engine, by the use of which a high measuring accuracy may be achieved, based on high measuring sensitivity and great thermal stability. In addition, the construction of the sensor system makes possible great system flexibility, and particularly very space-saving installation in the combustion chamber of an internal combustion engine. For this purpose, the sensor system includes at least one electrically conductive spring element and at least one electrically conductive counter-element,

Sensor system for measuring pressure

A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.

Rotation rate sensor

A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

Rotational rate sensor

An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Micromechanical rotational rate sensor

A fuel injector for fuel injection system of an internal combustion engine includes a solenoid coil, an armature acted upon in a closing direction by a return spring, and a valve-closure member frictionally connected to the armature. The valve-closure member, together with a valve-seat surface, forms a sealing seat, the armature striking with an armature stop face against a magnetic-pole surface of a magnet body. The armature stop face includes a first annular, inner edge zone that adjoins an inner edge and is inclined inwardly with respect to a plane perpendicular to longitudinal axis of the armature, and has a second annular, outside edge zone that adjoins an outer edge and is inclined outwardly with respect to a plane perpendicular to the longitudinal axis of the armature.

Fuel injector

A yaw-rate sensor is proposed having a first and a second Coriolis element ( ) which are arranged side-by-side above a surface ( ) of a substrate. The Coriolis elements ( ) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements ( ) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements ( ) are coupled by a spring ( ) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Rotation speed sensor

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Stuttgart, Germany

Christian Doering